MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …
have gained significant attention due to their miniaturization, high performance, and diverse …
Optical characterization of RF sputtered AlN thin film for acoustic and optoelectronics devices
The paper reports the optical characteristics of Radio Frequency (RF) sputtered piezoelectric
Aluminum Nitride (AlN) film on a quartz substrate. The AlN film of 300 nm thickness has …
Aluminum Nitride (AlN) film on a quartz substrate. The AlN film of 300 nm thickness has …