Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach

GA Susto, S Pampuri, A Schirru, A Beghi… - Computers & Operations …, 2015 - Elsevier
In semiconductor manufacturing, wafer quality control strongly relies on product monitoring
and physical metrology. However, the involved metrology operations, generally performed …

Regression methods for virtual metrology of layer thickness in chemical vapor deposition

H Purwins, B Barak, A Nagi, R Engel… - IEEE/ASME …, 2013 - ieeexplore.ieee.org
The quality of wafer production in semiconductor manufacturing cannot always be monitored
by a costly physical measurement. Instead of measuring a quantity directly, it can be …

Data mining and support vector regression machine learning in semiconductor manufacturing to improve virtual metrology

B Lenz, B Barak - 2013 46th Hawaii International Conference …, 2013 - ieeexplore.ieee.org
Advanced Process Control is an important research area in Semiconductor Manufacturing to
improve process stability crucial for product quality. Especially in low-volume-high-mixture …

Regression methods for predicting the product's quality in the semiconductor manufacturing process

M Melhem, B Ananou, M Ouladsine, J Pinaton - IFAC-PapersOnLine, 2016 - Elsevier
The quality of production in the wafer manufacturing process cannot be always monitored by
metrology tools because physical measurements are very expensive. Instead of conducting …

Self-Attention-Augmented Generative Adversarial Networks for Data-Driven Modeling of Nanoscale Coating Manufacturing

S Ji, J Zhu, Y Yang, H Zhang, Z Zhang, Z Xia, Z Zhang - Micromachines, 2022 - mdpi.com
Nanoscale coating manufacturing (NCM) process modeling is an important way to monitor
and modulate coating quality. The multivariable prediction of coated film and the data …

A virtual metrology system based on least angle regression and statistical clustering

GA Susto, A Beghi - Applied Stochastic Models in Business and …, 2013 - Wiley Online Library
In semiconductor manufacturing plants, monitoring physical properties of all wafers is crucial
to maintain good yield and high quality standards. However, such an approach is too costly …

Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes

GA Susto, AB Johnston, PG O'Hara… - 2013 IEEE …, 2013 - ieeexplore.ieee.org
Semiconductor fabrication involves several sequential processing steps with the result that
critical production variables are often affected by a superposition of affects over multiple …

Least angle regression for semiconductor manufacturing modeling

GA Susto, A Beghi - 2012 IEEE international conference on …, 2012 - ieeexplore.ieee.org
In semiconductor manufacturing plants, monitoring physical properties of all wafers is
fundamental in order to maintain good yield and high quality standards. However, such an …

Virtual metrology in semiconductor manufacturing by means of predictive machine learning models

B Lenz, B Barak, J Mührwald… - 2013 12th international …, 2013 - ieeexplore.ieee.org
Advanced Process Control (APC) is an important research area in Semiconductor
Manufacturing (SM) to improve process stability crucial for product quality. In low-volume …

Feasibility evaluation of virtual metrology for the example of a trench etch process

G Roeder, S Winzer, M Schellenberger… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
In semiconductor manufacturing, the implementation of advanced process control systems
has become essential for cost effective manufacturing at high product quality. In addition to …