Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach
In semiconductor manufacturing, wafer quality control strongly relies on product monitoring
and physical metrology. However, the involved metrology operations, generally performed …
and physical metrology. However, the involved metrology operations, generally performed …
Regression methods for virtual metrology of layer thickness in chemical vapor deposition
H Purwins, B Barak, A Nagi, R Engel… - IEEE/ASME …, 2013 - ieeexplore.ieee.org
The quality of wafer production in semiconductor manufacturing cannot always be monitored
by a costly physical measurement. Instead of measuring a quantity directly, it can be …
by a costly physical measurement. Instead of measuring a quantity directly, it can be …
Data mining and support vector regression machine learning in semiconductor manufacturing to improve virtual metrology
B Lenz, B Barak - 2013 46th Hawaii International Conference …, 2013 - ieeexplore.ieee.org
Advanced Process Control is an important research area in Semiconductor Manufacturing to
improve process stability crucial for product quality. Especially in low-volume-high-mixture …
improve process stability crucial for product quality. Especially in low-volume-high-mixture …
Regression methods for predicting the product's quality in the semiconductor manufacturing process
M Melhem, B Ananou, M Ouladsine, J Pinaton - IFAC-PapersOnLine, 2016 - Elsevier
The quality of production in the wafer manufacturing process cannot be always monitored by
metrology tools because physical measurements are very expensive. Instead of conducting …
metrology tools because physical measurements are very expensive. Instead of conducting …
Self-Attention-Augmented Generative Adversarial Networks for Data-Driven Modeling of Nanoscale Coating Manufacturing
Nanoscale coating manufacturing (NCM) process modeling is an important way to monitor
and modulate coating quality. The multivariable prediction of coated film and the data …
and modulate coating quality. The multivariable prediction of coated film and the data …
A virtual metrology system based on least angle regression and statistical clustering
In semiconductor manufacturing plants, monitoring physical properties of all wafers is crucial
to maintain good yield and high quality standards. However, such an approach is too costly …
to maintain good yield and high quality standards. However, such an approach is too costly …
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
GA Susto, AB Johnston, PG O'Hara… - 2013 IEEE …, 2013 - ieeexplore.ieee.org
Semiconductor fabrication involves several sequential processing steps with the result that
critical production variables are often affected by a superposition of affects over multiple …
critical production variables are often affected by a superposition of affects over multiple …
Least angle regression for semiconductor manufacturing modeling
In semiconductor manufacturing plants, monitoring physical properties of all wafers is
fundamental in order to maintain good yield and high quality standards. However, such an …
fundamental in order to maintain good yield and high quality standards. However, such an …
Virtual metrology in semiconductor manufacturing by means of predictive machine learning models
B Lenz, B Barak, J Mührwald… - 2013 12th international …, 2013 - ieeexplore.ieee.org
Advanced Process Control (APC) is an important research area in Semiconductor
Manufacturing (SM) to improve process stability crucial for product quality. In low-volume …
Manufacturing (SM) to improve process stability crucial for product quality. In low-volume …
Feasibility evaluation of virtual metrology for the example of a trench etch process
G Roeder, S Winzer, M Schellenberger… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
In semiconductor manufacturing, the implementation of advanced process control systems
has become essential for cost effective manufacturing at high product quality. In addition to …
has become essential for cost effective manufacturing at high product quality. In addition to …