Excimer laser crystallization and nanostructuring of amorphous silicon for photovoltaic applications

A Adikaari, SRP Silva - Nano, 2008 - World Scientific
Excimer laser crystallization of amorphous silicon has been extensively studied for
electronic applications. Most of the early works has been on thin film transistor fabrication …

Excimer laser induced nanostructuring of silicon surfaces

P Kumar, MG Krishna… - Journal of nanoscience …, 2009 - ingentaconnect.com
The effect of KrF excimer laser energy density (below and above the ablation threshold),
number of shots and angle of laser incidence on the morphological reconstruction, structure …

Nano-structure formed by nanosecond laser annealing on amorphous Si surface

D Klinger, E Łusakowska, D Żymierska - Materials science in …, 2006 - Elsevier
The formation of nano-structure on an amorphised Si surface is studied upon annealing by a
nanosecond laser pulse of an excimer laser. The resulting structures are studied by means …

Solidification velocity in liquid silicon during excimer laser crystallization

CC Kuo - Applied Physics A, 2009 - Springer
Excimer laser crystallization (ELC) is commonly employed to fabricate low-temperature
polycrystalline silicon. A time-resolved in-situ optical system with nanosecond response time …

Pulsed TEA CO2 laser surface modifications of silicon

MS Trtica, BM Gaković - Applied Surface Science, 2003 - Elsevier
The interaction of a transversely excited atmospheric (TEA) CO2 laser, pulse duration of
about 2μs (FWHM of initial spike= 120ns), with p-type single crystalline silicon doped by …

Laser-induced crystallization of calcium phosphate coatings on polyethylene (PE)

B Feddes, AM Vredenberg, M Wehner, JCG Wolke… - Biomaterials, 2005 - Elsevier
Calcium phosphate (CaP) coatings are used for obtaining a desired biological response.
Usually, CaP coatings on metallic substrates are crystallized by annealing at temperatures …

Low-temperature fabricated TFTs on polysilicon stripes

I Brunets, J Holleman, AY Kovalgin… - IEEE transactions on …, 2009 - ieeexplore.ieee.org
This paper presents a novel approach to make high-performance CMOS at low
temperatures. Fully functional devices are manufactured using back-end compatible …

Controlled growth of high-quality poly-silicon thin films with huge grains on glass substrates using an excimer laser

F Zhang, X Liu, G Ni, Y Du - Journal of crystal growth, 2004 - Elsevier
As the best results reported to date, high-quality poly-silicon thin film materials with huge
grains have been fabricated on large-area glass substrates using the technique of excimer …

Dynamical resolidification behavior of silicon thin films during frontside and backside excimer laser annealing

CC Kuo - Optics and Lasers in Engineering, 2011 - Elsevier
Excimer laser annealing (ELA) is frequently employed to fabricate low-temperature
polycrystalline silicon films on glass substrate. The grain size and crystallinity of …

Excimer laser induced crystallization of amorphous hydrogenated carbon–germanium films fabricated by plasma CVD

J Tyczkowski, P Kazimierski, Y Hatanaka… - Surface and Coatings …, 2005 - Elsevier
Excimer laser irradiation was demonstrated to be effective for the crystallization of the
semiconducting form (aS) of amorphous hydrogenated carbon− germanium (a-GeXCY: H) …