An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

This paper reviews the development of silicon resonant accelerometers from 1987 to 2022.
For more than 30 years, silicon resonant accelerometers have developed into varieties of …

This paper presents a silicon oscillating accelerometer (SOA) with a new CMOS readout
circuit architecture. A phase lock loop (PLL) with a hybrid and antinoise folding PFD is …

The development of mode-localized sensors based on amplitude output metrics has
attracted increasing attention in recent years due to the potential of such sensors for high …

This paper describes a silicon-on-insulator MEMS oscillating accelerometer with a fully
differential CMOS continuous-time oscillation sustaining circuit and a digital frequency …

This paper describes the design, fabrication and experimental evaluation of a silicon
micromachined resonant accelerometer that demonstrates high sensitivity and low noise …

This paper proposes a novel method to reduce the water interference on the touch panel
based on mutual-capacitance sensing in human finger detection. As the height of a finger …

Microelectromechanical system (MEMS) resonant accelerometers have attracted significant
interest for practical application owing to their high sensitivity and quasi-digital output. One …

A system phase noise model is proposed in this paper for frequency-modulated (FM)
gyroscopes, which gives us a clearly guidance for different noise and how to improve the …

Phase noise is an essential performance indicator for microelectromechanical system
(MEMS) resonant accelerometers. The optimal resolution achievable is limited by the close …