A microelectromechanical (MEM) actuator incorporates a dual-stator design operated
electrostatically in conjunction with a rotor to affect a fine positioning of a thin film magnetic …

(57) ABSTRACT A valve can varied in operating pressure and Stopped in opening and
closing by an efficiently movable actuator due to feeding of electric power without …

A piezo in-tongue microactuator includes a suspension assembly with a flexure tongue. The
tongue has two slots that accept piezo actuators. The tongue also has multiple hinge flexible …

An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in
facing relation to the plate member, and a beam disposed between the plate member and …

The present invention relates to a microelectromechanical (MEM) apparatus, comprising a
Substrate; a platform (ie a stage) supported above the substrate by a trio of flexible …

Devices with mechanical drivers for displaceable elements are described. In one aspect, a
device includes a displaceable element, a driver, and a controller. The driver includes a …

According to one aspect of the present invention, there is provided a thermal ink-jet
printhead comprising at least one ejector. The ejector includes a structure defining a …

(57) ABSTRACT A PC board actuator that emulates a muscle fiber includes a first pressure
Source, a Second preSSure Source lower than the first Source, at least one expansion …

An actuator device has a drive section including a plurality of actuators arranged in a plane
on a substrate, and a single first plate member to which drive forces from the actuators of the …

A microscopic positioning device having machine rigidity and being capable of achieving
nano-order positioning accuracy and a method of compensating tool position and …