Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications

XG Chen, HG Gu, JM Liu, C Chen, SY Liu - Science China Technological …, 2022 - Springer
Mueller matrix ellipsometry (MME) provides the 4× 4 Mueller matrix of a sample under test,
which determines how the state of polarization is changed as light interacts with the sample …

Dynamic risk-aware patch scheduling

F Zhang, Q Li - 2020 IEEE Conference on Communications …, 2020 - ieeexplore.ieee.org
Every month, many new software vulnerabilities are discovered and published which will
pose security risks to power grid systems if they are exploited by attackers. Thus the …

High-speed Mueller matrix ellipsometer with microsecond temporal resolution

S Zhang, H Jiang, H Gu, X Chen, S Liu - Optics express, 2020 - opg.optica.org
A high-speed Mueller matrix ellipsometer (MME) based on photoelastic modulator (PEM)
polarization modulation and division-of-amplitude polarization demodulation has been …

Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer

J Liu, Z Jiang, S Zhang, T Huang, H Jiang, S Liu - Thin Solid Films, 2023 - Elsevier
With the urgent demands of characterizing the optical properties and thicknesses of nano-
films in some micron-scale trenches usually emerging in integrated circuit manufacturing …

Accurate and robust calibration method for simultaneous Stokes polarimetry

J Li, H Liu, Y Zheng, J Lei, Q Zhao, Z Xiong, R Liao… - Measurement, 2023 - Elsevier
The simultaneous Stokes polarimetry (SSP) plays a crucial role in various fields, including
the characterization of suspended particles in air and water, as well as the measurement of …

Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces

CW Chen, M Hartrumpf, T Längle… - Journal of Vacuum …, 2020 - pubs.aip.org
Ellipsometry is a widely-used and highly-accurate method for characterizing materials and
thin films, though conventional ellipsometry restricts the geometric shape of samples to flat …

Microstructural characteristics of sandwiched T-shaped metamaterials for three-port splitting

G Liang, W Bo - Laser Physics, 2022 - iopscience.iop.org
This paper presents a polarization-insensitive sandwiched three-port beam splitting grating
at normal incidence. The grating adopts a sandwiched structure. Based on the rigorous …

Polarization distortion and compensation of circularly polarized emission from chiral metasurfaces

Y Lim, IC Seo, YC Jun - Current Optics and Photonics, 2023 - opg.optica.org
Circularly polarized (CP) emission can be achieved by integrating emissive materials into
chiral metasurfaces. Such CP light sources in integrated device platforms are desirable for …

Development and Calibration of a Vertical High-Speed Mueller Matrix Ellipsometer

J Liu, S Zhang, B Deng, L Li, H Gu, J Zhu, H Jiang… - Photonics, 2023 - mdpi.com
In order to meet the requirements of dynamic monitoring from a bird's eye view for typical
rapidly changing processes such as mechanical rotation and photoresist exposure reaction …

Attitude metrology based on the field-of-view effect of birefringence using high-speed polarimetry

S Zhang, H Jiang, H Gu, X Chen, S Liu - Optics Letters, 2020 - opg.optica.org
A novel, to the best of our knowledge, optical method using a high-speed polarimetry is
proposed for real-time attitude tracking in an ultra-large measurement range. The attitude …