Advanced Mueller matrix ellipsometry: Instrumentation and emerging applications
Mueller matrix ellipsometry (MME) provides the 4× 4 Mueller matrix of a sample under test,
which determines how the state of polarization is changed as light interacts with the sample …
which determines how the state of polarization is changed as light interacts with the sample …
Dynamic risk-aware patch scheduling
Every month, many new software vulnerabilities are discovered and published which will
pose security risks to power grid systems if they are exploited by attackers. Thus the …
pose security risks to power grid systems if they are exploited by attackers. Thus the …
High-speed Mueller matrix ellipsometer with microsecond temporal resolution
A high-speed Mueller matrix ellipsometer (MME) based on photoelastic modulator (PEM)
polarization modulation and division-of-amplitude polarization demodulation has been …
polarization modulation and division-of-amplitude polarization demodulation has been …
Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer
With the urgent demands of characterizing the optical properties and thicknesses of nano-
films in some micron-scale trenches usually emerging in integrated circuit manufacturing …
films in some micron-scale trenches usually emerging in integrated circuit manufacturing …
Accurate and robust calibration method for simultaneous Stokes polarimetry
The simultaneous Stokes polarimetry (SSP) plays a crucial role in various fields, including
the characterization of suspended particles in air and water, as well as the measurement of …
the characterization of suspended particles in air and water, as well as the measurement of …
Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces
CW Chen, M Hartrumpf, T Längle… - Journal of Vacuum …, 2020 - pubs.aip.org
Ellipsometry is a widely-used and highly-accurate method for characterizing materials and
thin films, though conventional ellipsometry restricts the geometric shape of samples to flat …
thin films, though conventional ellipsometry restricts the geometric shape of samples to flat …
Microstructural characteristics of sandwiched T-shaped metamaterials for three-port splitting
G Liang, W Bo - Laser Physics, 2022 - iopscience.iop.org
This paper presents a polarization-insensitive sandwiched three-port beam splitting grating
at normal incidence. The grating adopts a sandwiched structure. Based on the rigorous …
at normal incidence. The grating adopts a sandwiched structure. Based on the rigorous …
Polarization distortion and compensation of circularly polarized emission from chiral metasurfaces
Circularly polarized (CP) emission can be achieved by integrating emissive materials into
chiral metasurfaces. Such CP light sources in integrated device platforms are desirable for …
chiral metasurfaces. Such CP light sources in integrated device platforms are desirable for …
Development and Calibration of a Vertical High-Speed Mueller Matrix Ellipsometer
In order to meet the requirements of dynamic monitoring from a bird's eye view for typical
rapidly changing processes such as mechanical rotation and photoresist exposure reaction …
rapidly changing processes such as mechanical rotation and photoresist exposure reaction …
Attitude metrology based on the field-of-view effect of birefringence using high-speed polarimetry
A novel, to the best of our knowledge, optical method using a high-speed polarimetry is
proposed for real-time attitude tracking in an ultra-large measurement range. The attitude …
proposed for real-time attitude tracking in an ultra-large measurement range. The attitude …