Modern developments in shear-stress measurement
JW Naughton, M Sheplak - Progress in Aerospace Sciences, 2002 - Elsevier
This paper reviews three relatively modern categories of skin-friction measurement
techniques that are broadly classified as microelectromechanical systems (MEMS)-based …
techniques that are broadly classified as microelectromechanical systems (MEMS)-based …
Two-dimensional micromachined flow sensor array for fluid mechanics studies
We discuss two types of micromachined flow sensors realized by using novel
microfabrication processes—a hot-wire anemometer (based on thermal transfer) and a …
microfabrication processes—a hot-wire anemometer (based on thermal transfer) and a …
IC-integrated flexible shear-stress sensor skin
This paper reports the successful development of the first IC-integrated flexible MEMS shear-
stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 μm thick. It contains 16 …
stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 μm thick. It contains 16 …
Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors
This paper presents the design, fabrication, and characterization of unique piezoresistive
microfabricated shear stress sensors for direct measurements of shear stress underwater …
microfabricated shear stress sensors for direct measurements of shear stress underwater …
A flexible flow sensor system and its characteristics for fluid mechanics measurements
P Liu, R Zhu, R Que - Sensors, 2009 - mdpi.com
In this paper, we present a novel micromachined hot-film flow sensor system realized by a
technique using a film depositing processes and incorporating a standard printed circuit …
technique using a film depositing processes and incorporating a standard printed circuit …
Sensitivity enhancement of silicon-on-insulator CMOS MEMS thermal hot-film flow sensors by minimizing membrane conductive heat losses
Minimizing conductive heat losses in Micro-Electro-Mechanical-Systems (MEMS) thermal
(hot-film) flow sensors is the key to minimize the sensors' power consumption and maximize …
(hot-film) flow sensors is the key to minimize the sensors' power consumption and maximize …
Apparatus for detecting environmental conditions for a structure or article
C Liu, J Engel - US Patent 7,343,136, 2008 - Google Patents
US7343136B2 - Apparatus for detecting environmental conditions for a structure or article -
Google Patents US7343136B2 - Apparatus for detecting environmental conditions for a …
Google Patents US7343136B2 - Apparatus for detecting environmental conditions for a …
Polymer MEMS-based Fabry-Perot shear stress sensor
FG Tseng, CJ Lin - IEEE Sensors Journal, 2003 - ieeexplore.ieee.org
This paper reports a novel optical fiber-based micro-shear stress sensor utilizing a flexible
membrane and double SU-8 resist structures as a moving micro-mirror, together with an …
membrane and double SU-8 resist structures as a moving micro-mirror, together with an …
Sensor chip and apparatus for tactile and/or flow sensing
C Liu, J Chen, J Engel - US Patent 7,357,035, 2008 - Google Patents
2004-10-01 Assigned to BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE
reassignment BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE …
reassignment BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS, THE …
A micro shear stress sensor based on laterally aligned carbon nanotubes
S Tung, H Rokadia, WJ Li - Sensors and Actuators A: Physical, 2007 - Elsevier
This paper reports the development of a micro thermal shear stress sensor that utilizes
multiwalled carbon nanotubes as the sensing element. The sensor was fabricated by …
multiwalled carbon nanotubes as the sensing element. The sensor was fabricated by …