Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations
WM Van Spengen - Journal of Micromechanics and …, 2012 - iopscience.iop.org
This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …
RF MEMS switches in their development toward commercialization. Dielectric charging and …
Research and analysis of MEMS switches in different frequency bands
W Tian, P Li, LX Yuan - Micromachines, 2018 - mdpi.com
Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …
microelectromechanical systems (MEMS) switches have drawn much attention from …
Ions matter: description of the anomalous electronic behavior in methylammonium lead halide perovskite devices
Carrier transport in methylammonium lead iodide (MAPbI3)‐based hybrid organic–inorganic
perovskites (HOIPs) is obscured by vacancy‐mediated ion migration. Thus, the nature of …
perovskites (HOIPs) is obscured by vacancy‐mediated ion migration. Thus, the nature of …
Low-voltage high-reliability MEMS switch for millimeter wave 5G applications
Lack of reliability of radio-frequency microelectromechanical systems (RF MEMS) switches
has inhibited their commercial success. Dielectric stiction/breakdown and mechanical shock …
has inhibited their commercial success. Dielectric stiction/breakdown and mechanical shock …
Review of device and reliability physics of dielectrics in electrostatically driven MEMS devices
WA de Groot, JR Webster, D Felnhofer… - IEEE Transactions on …, 2009 - ieeexplore.ieee.org
After decades of improving semiconductor-device reliability, dielectric failure rates resulting
from surface-charge accumulation, dielectric breakdown, and charge injection have been …
from surface-charge accumulation, dielectric breakdown, and charge injection have been …
Material dielectricity effects on the performance of capacitive micro-devices: a nonlinear study
S Valizadeh, M Fathalilou, G Rezazadeh - International Journal of …, 2023 - Springer
Nowadays, research on the application of new materials with interesting electrical
properties, such as high dielectric constant, on electrostatically-actuated microstructures has …
properties, such as high dielectric constant, on electrostatically-actuated microstructures has …
On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel …
This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …
Effect of grain boundaries on charge transport in methylammonium lead iodide perovskite thin films
Methylammonium lead iodide (MAPbI3) has attracted great interest as an organic–inorganic
hybrid perovskite for photovoltaic applications. Vacancy-mediated ion migration is one of the …
hybrid perovskite for photovoltaic applications. Vacancy-mediated ion migration is one of the …
The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)
The potential of micro and nano electromechanical systems (M and NEMS) has expanded
due to advances in materials and fabrication processes. A wide variety of materials are now …
due to advances in materials and fabrication processes. A wide variety of materials are now …
On the influence of environment gases, relative humidity and gas purification on dielectric charging/discharging processes in electrostatically driven MEMS/NEMS …
In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …
dielectric charging phenomenon in electrostatically actuated micro-and nano …