As one of the most advanced and precise equipment in the world, a photolithography
scanner is able to fabricate nanometer‐scale devices on a chip. To realize such a small …

A novel cylindrical magnetic levitation gravity compensator (MLGC) with low-stiffness and
vacuum-compatible characteristics is proposed in this paper. This compensator can be used …

This paper presents a three-degree-of-freedom (3-DOF) Lorentz-force-driven planar motor
for a nanopositioning system. The short-stroke planar motor consists of three Lorentz-force …

In this paper, a Lorentz force-based XY positioning stage with a stack of four electromagnetic
linear motors in parallel configuration is presented. The overall design of the positioning …

We present a prototype of 6-DOF magnetically levitated stage based on single axis Lorentz
force actuator is capable of positioning down to micron in several millimeter travel range with …

In this paper, a novel Lorentz-force-driven DC planar motor with low force ripple is proposed.
The magnetic field distribution is calculated analytically by using magnetic surface charge …

In this paper, the concept of a two layer coil based electromagnetic actuator for planar
motions is presented. The actuator is composed of two pairs of fixed overlapped 2D electric …

100 nm 步进扫描投影光刻机是我国攻关研究的主流机型, 工作台是实现其超精密性能的核心子
系统. 光刻机工作台采用粗, 微复合的运动结构, 其同步最大运动平均误差(< 5 nm) …

A practical iterative tuning algorithm of a decoupling controller is presented to eliminate
intrinsic coupling among 3-DOF precision motion stage. General decoupling control cannot …