摘要熔石英光学元件在高能量密度的紫外脉冲激光辐照下往往极易出现后表面损伤,
这严重影响了紫外高功率脉冲激光装置的可靠性. 综合国内外相关研究进展 …

摘要熔石英光学元件经过精密加工后亚表面存在大量缺陷, 这些缺陷在强激光辐照下易引发激光
诱导损伤, 威胁熔石英元件在紫外激光(351 nm/355 nm) 辐照下的正常运行. 在湿法刻蚀工艺中 …

Laser damage in fused silica, particularly ultraviolet laser damage, is still a key problem
limiting the development of high-power laser systems. In this Letter, a combined process of …

We investigate the interest of combined process of reactive ion etching (RIE) and dynamic
chemical etching (DCE) as a final step after polishing to improve the laser damage …

The optical performance of fused silica optics used in high-power lasers is known to depend
not only on their surface damage resistance, but also on their surface quality. Previous …

We investigate the nanoscale damage precursors that will cause laser damage initiation on
fused silica surface during KOH-based wet etching. Some nanoscale damage precursors …

We investigate the role of each step in the combined treatment of reactive ion etching (RIE)
and dynamic chemical etching (DCE) for improving the laser-induced damage resistance of …

A new method that combines scanning ion beam etching (IBE) and dynamic chemical
etching (DCE) is proposed to tracelessly remove the subsurface damage (SSD) layer of …

The requirements for dichroic laser mirrors continue to increase with the development of
laser technology. The challenge of a dichroic laser mirror coating is to simultaneously obtain …

Laser damage of fused silica is a critical problem that limits the fluence increase of high-
power laser systems. The reaction of plasma processing of fused silica was analyzed. The …