Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …

In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and
compressibility with a compact and small design is presented. The fluid measurement …

In this work we present an array of piezoelectric micromachined ultrasound transducer
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …

In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound
transducers (PMUTs) monolithically integrated over a CMOS technology are developed …

This article presents the development of small sized piezoelectric micromachined ultrasound
transducer (PMUT) with cost effective fabrication process. Improved ultrasound imaging …

Thin-film piezoelectric micromachined ultrasound transducers (PMUTs) are an increasingly
relevant and well-researched field, and their biomedical importance has been growing as …

This paper introduces a piezoelectric micromachined ultrasonic transducer (PMUT) capable
of simultaneous acoustic power transfer and multi-channel data telemetry. Using a custom …

This paper presents a monolithic system-on-chip based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) and its CMOS analog front-end circuitry. This …

Current bulk acoustic microresonators offer improved resolution respect to Quartz Crystal
Microbalance and Surface Acoustic Wave devices, but tend to be brittle during operation as …