A diverse spectrum of technology drivers such as improved thermal barriers, higher
efficiency thermoelectric energy conversion, phase-change memory, heat-assisted magnetic …

Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale
heat flow measurements, materials characterization, nanomanufacturing, and many other …

This topical review is focused on microcantilever-based sensing and probing functions that
are realized by integrating a mechanically compliant cantilever with self-sensing and self …

A hot wire probe has been developed for use inside a transmission electron microscope to
measure the thermal resistance of individual nanowires, nanotubes, and their contacts. No …

The lateral resolution of scanning thermal microscopy (SThM) has hitherto never
approached that of mainstream atomic force microscopy, mainly due to poor performance of …

Practically applicable microelectromechanical systems (MEMS) and nanomachines have
been developed by applying dry processes. Deep reactive ion etching (RIE) of silicon and its …

The properties of electrostatic, electromagnetic and piezoelectric actuators used for XY-
microstage are compared to indicate high area efficiency but no good machinability of …

В современной микроэлектронике наиболее интенсивно развивающимся сектором
являются микроэлектромеханические системы (MEMS—Micro-Electro-Mechanical …

We report parallel topographic imaging and nanolithography using heated microcantilever
arrays integrated into a commercial atomic force microscope (AFM). The array has five AFM …

In comparison with miniature XY-stages in term of driving methods: electrostatic,
electromagnetic and piezoelectric actuators, the piezoelectric actuators have high area …