Tuning characteristics of AlN-based piezoelectric micromachined ultrasonic transducers using DC bias voltage
In this article, we investigate the effects of dc bias voltage on characteristics for Aluminum
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …
Piezoelectric MEMS acoustic transducer with electrically-tunable resonant frequency
The paper presents a technique to obtain an electrically-tunable matching between the
series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to …
series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to …
Cell alignment in aqueous solution employing a flexural plate wave piezoelectric MEMS transducer
The possibility to steer floating cells dispersed in water by means of flexural plate waves
(FPWs) generated by a 9 mm mm piezoelectric MEMS transducer has been explored. The …
(FPWs) generated by a 9 mm mm piezoelectric MEMS transducer has been explored. The …
Piezoelectric MEMS Flexural-Plate-Wave Transducer for Alignment of Microparticles in a Drying Droplet
The possibility of obtaining aligned clusters of microparticles in a drying water droplet by
employing standing flexural plate waves (FPWs) generated by a piezoelectric MEMS …
employing standing flexural plate waves (FPWs) generated by a piezoelectric MEMS …
Piezoelectric MEMS for sensors, actuators and energy harvesting
Examples of piezoelectric MEMS (micro-electromechanical systems) developed to work as
sensors, actuators and energy harvesting devices are presented. Specifically, a distance …
sensors, actuators and energy harvesting devices are presented. Specifically, a distance …
A nonlinear pulse shaping method using resonant piezoelectric MEMS devices
In this article, a methodology for increasing the displacement of the membrane in nonlinear
transducers is presented. This methodology that relies on pulse shaping is based on the …
transducers is presented. This methodology that relies on pulse shaping is based on the …
Flexural plate wave piezoelectric MEMS transducer for cell alignment in aqueous solution
In this work, the possibility to align cells dispersed in water by means of standing flexural
plate waves (FPWs) in an underlying substrate has been explored by designing and …
plate waves (FPWs) in an underlying substrate has been explored by designing and …