Tuning characteristics of AlN-based piezoelectric micromachined ultrasonic transducers using DC bias voltage

Z Wu, W Liu, Z Tong, Y Cai, C Sun… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, we investigate the effects of dc bias voltage on characteristics for Aluminum
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …

Piezoelectric MEMS acoustic transducer with electrically-tunable resonant frequency

A Nastro, M Ferrari, L Rufer, S Basrour, V Ferrari - Micromachines, 2022 - mdpi.com
The paper presents a technique to obtain an electrically-tunable matching between the
series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to …

Cell alignment in aqueous solution employing a flexural plate wave piezoelectric MEMS transducer

A Nastro, M Baù, M Ferrari, L Rufer, S Basrour… - IEEE …, 2023 - ieeexplore.ieee.org
The possibility to steer floating cells dispersed in water by means of flexural plate waves
(FPWs) generated by a 9 mm mm piezoelectric MEMS transducer has been explored. The …

Piezoelectric MEMS Flexural-Plate-Wave Transducer for Alignment of Microparticles in a Drying Droplet

A Nastro, M Baù, M Ferrari, L Rufer… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
The possibility of obtaining aligned clusters of microparticles in a drying water droplet by
employing standing flexural plate waves (FPWs) generated by a piezoelectric MEMS …

Piezoelectric MEMS for sensors, actuators and energy harvesting

A Nastro, M Baù, M Ferrari, V Ferrari - AISEM Annual Conference on …, 2021 - Springer
Examples of piezoelectric MEMS (micro-electromechanical systems) developed to work as
sensors, actuators and energy harvesting devices are presented. Specifically, a distance …

A nonlinear pulse shaping method using resonant piezoelectric MEMS devices

M Gratuze, AH Alameh, A Robichaud… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, a methodology for increasing the displacement of the membrane in nonlinear
transducers is presented. This methodology that relies on pulse shaping is based on the …

Flexural plate wave piezoelectric MEMS transducer for cell alignment in aqueous solution

A Nastro, M Baù, M Ferrari, L Rufer, S Basrour… - Annual Meeting of the …, 2022 - Springer
In this work, the possibility to align cells dispersed in water by means of standing flexural
plate waves (FPWs) in an underlying substrate has been explored by designing and …