An emerging era: conformable ultrasound electronics
Conformable electronics are regarded as the next generation of personal healthcare
monitoring and remote diagnosis devices. In recent years, piezoelectric‐based conformable …
monitoring and remote diagnosis devices. In recent years, piezoelectric‐based conformable …
Cost-effective strategy for developing small sized high frequency PMUTs toward phased array imaging applications
B Yu, C Yu, L Zhang, Z Wang, X Xu… - Journal of …, 2022 - ieeexplore.ieee.org
This article presents the development of small sized piezoelectric micromachined ultrasound
transducer (PMUT) with cost effective fabrication process. Improved ultrasound imaging …
transducer (PMUT) with cost effective fabrication process. Improved ultrasound imaging …
Fully integrated pitch-matched AlScN PMUT-on-CMOS array for high resolution Ultrasound Images
This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound …
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound …
A differential SPDT T/R switch for PMUT biomedical ultrasound systems
This paper presents a differential T/R SPDT switch, designed in a 0.18 µm HV BCD
technology for PMUTbased biomedical ultrasound systems. It incorporates a bootstrapping …
technology for PMUTbased biomedical ultrasound systems. It incorporates a bootstrapping …
An AlSCN PMUT-on-CMOS sensor for monitoring fluids' density, viscosity, sound velocity, and compressibility
This paper presents a monolithic system-on-chip based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) and its CMOS analog front-end circuitry. This …
micromachined ultrasonic transducer (PMUT) and its CMOS analog front-end circuitry. This …
A 0.5 mm2 pitch-matched AlN PMUT-on-CMOS ultrasound imaging system
This paper presents a 0.5 mm 2 pitch-matched array based on 7x7 AlN piezoelectric
micromachined ultrasonic transducers (PMUTs) monolithically integrated with its 130 nm …
micromachined ultrasonic transducers (PMUTs) monolithically integrated with its 130 nm …
A Single-chip AlScN PMUTs-on-CMOS hydrophone
This work presents a minute single chip PMUTs-on-CMOS-based hydrophone with high
receiving sensitivities and low noise. The system is based on three different Sc 9.5% Al …
receiving sensitivities and low noise. The system is based on three different Sc 9.5% Al …
Sub-1mm2 High Detection Capability PMUTS-on-CMOS Array for Ultrasound Images
This paper presents an annular multi-element piezoelectric micromachined ultrasonic
transducer (PMUT) array fabricated monolithically over a 130 nm complementary metal …
transducer (PMUT) array fabricated monolithically over a 130 nm complementary metal …
Process Control Monitoring Devices for CMOS-MEMS Monolithic PMUT Technology
E Marigó, S Kumaaran, M Safwan… - 2024 IEEE 37th …, 2024 - ieeexplore.ieee.org
MEMS fabrication makes use of the know-how and fabrication methods inherited from
semiconductors. Similarly multiple successive processing steps are required such as …
semiconductors. Similarly multiple successive processing steps are required such as …
A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array
E Ledesma, I Zamora, F Torres… - 2023 IEEE 36th …, 2023 - ieeexplore.ieee.org
This paper presents a 0.35 mm 2 multi-element annular piezoelectric micromachined
ultrasonic transducer array monolithically integrated on CMOS (PMUT-on-CMOS) capable of …
ultrasonic transducer array monolithically integrated on CMOS (PMUT-on-CMOS) capable of …