The present paper is based on the materials of the Invited Lecture presented at 29th
Summer School and International Symposium on the Physics of Ionized Gases (28 August …

The aim of this study is to assess the effect of argon gas (0–30%) addition in pure nitrogen
and nitrogen‑hydrogen admixture on the surface properties of plain carbon steel by cathodic …

Correlations between physical properties linking film quality with wet etch rate (WER), one of
the leading figures of merit, in plasma-enhanced atomic layer deposition (PEALD) grown …

Silver thin films were prepared by direct current (DC) magnetron sputtering technique in
Ar/N2 atmosphere with various N2 volumetric ratios on Si substrates. Silver thin films …

Plasma nitrocarburizing has been widely used to improve the hardness of stainless steels
without affecting their good corrosion resistance property. The process is usually carried out …

The addition of hydrogen to nitrogen facilitates the formation of nitride phases in the plasma
nitriding processes of stainless steels, though it also induces the deterioration of their …

A microwave atmospheric pressure plasma jet (MW‐APPJ) generator based on a substrate‐
integrated waveguide (SIW) resonator is proposed. A thin, straight plasma needle with a …

AISI 420 steel samples were subjected to three heat treatment conditions: annealed,
hardened, and tempered at 400° C, followed by low-temperature nitriding using N2, H2, and …

In this study, we explored the key properties and functionalities of plasma enhanced atomic
layer deposition (PEALD) SiN x films, synthesized using different deposition temperatures …

DC generated Ar–CO 2 discharge for plasma mixtures at 2.0 Torr is investigated to evaluate
the variation in the electron temperature and density, electron energy distribution function …