High-accuracy ultrasonic rangefinders via pMUTs arrays using multi-frequency continuous waves

X Chen, J Xu, H Chen, H Ding… - Journal of …, 2019 - ieeexplore.ieee.org
This paper presents a high accuracy air-coupled reflective ultrasonic rangefinder based on
piezoelectric micromachined ultrasonic transducers (pMUTs) using multi-frequency …

Highly accurate airflow volumetric flowmeters via pMUTs arrays based on transit time

X Chen, C Liu, D Yang, X Liu, L Hu… - Journal of …, 2019 - ieeexplore.ieee.org
This paper describes a highly accurate airflow volumetric flowmeter using piezoelectric
micromachined ultrasonic transducers (pMUTs) arrays based on transit time. Two pieces of …

Capacitive micromachined ultrasonic transducers (CMUTs) for underwater imaging applications

J Song, C Xue, C He, R Zhang, L Mu, J Cui, J Miao… - Sensors, 2015 - mdpi.com
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is
designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation …

Nonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysis

HK Oguz, S Olcum, MN Senlik, V Tas… - IEEE transactions on …, 2010 - ieeexplore.ieee.org
Finite element method (FEM) is used for transient dynamic analysis of capacitive
micromachined ultrasonic transducers (CMUT) and is particularly useful when the …

Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound

J Chen - Journal of Micromechanics and Microengineering, 2010 - iopscience.iop.org
This paper reviews the minimally invasive capacitive micromachined ultrasonic transducer
(CMUT) arrays for medical diagnosis and therapy. While piezoelectric transducers dominate …

A photoacoustic imager with light illumination through an infrared-transparent silicon CMUT array

J Chen, M Wang, JC Cheng, YH Wang… - IEEE transactions on …, 2012 - ieeexplore.ieee.org
A novel hardware design and preliminary experimental results for photoacoustic imaging
are reported in this paper. This imaging system makes use of an infrared-transparent …

Surface-micromachined CMUT using low-temperature deposited silicon carbide membranes for above-IC integration

Q Zhang, PV Cicek, K Allidina, F Nabki… - Journal of …, 2013 - ieeexplore.ieee.org
This paper presents a surface-micromachining technology to fabricate silicon carbide (SiC)-
based capacitive micromachined ultrasonic transducers (CMUTs). The use of dc-sputtered …

A thermophone on porous polymeric substrate

G Chitnis, A Kim, SH Song, AM Jessop… - Applied Physics …, 2012 - pubs.aip.org
In this Letter, we present a simple, low-temperature method for fabricating a wide-band (> 80
kHz) thermo-acoustic sound generator on a porous polymeric substrate. We were able to …

Volumetric flow measurement using an implantable CMUT array

M Wang, J Chen - IEEE transactions on biomedical circuits and …, 2011 - ieeexplore.ieee.org
This paper describes volumetric-flow velocity measurement using an implantable capacitive
micromachined ultrasonic transducer (CMUT) array. The array is comprised of multiple …

An FPGA-based ultrasound imaging system using capacitive micromachined ultrasonic transducers

LLP Wong, AI Chen, AS Logan… - IEEE transactions on …, 2012 - ieeexplore.ieee.org
We report the design and experimental results of a field-programmable gate array (FPGA)-
based real-time ultrasound imaging system that uses a 16-element phased-array capacitive …