Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering
We have developed a microelectromechanical system (MEMS) optical phased array
incorporating a high-index-contrast subwavelength grating (HCG) for beamforming and …
incorporating a high-index-contrast subwavelength grating (HCG) for beamforming and …
Effect of Silicon Substrate Resistivity on Large-Area High Voltage Spiral Inductor Performance
In this work, we compare the performance of a large square spiral inductor with an area of
1.08× 1.08 mm 2 and an operating frequency of a few hundred MHz, integrated atop four …
1.08× 1.08 mm 2 and an operating frequency of a few hundred MHz, integrated atop four …
[PDF][PDF] Electroacoustic analysis of a controlled damping planar CMOS-MEMS electrodynamic microphone
This paper gives a detailed electroacoustic study of a new generation of monolithic CMOS
micromachined electrodynamic microphone, made with standard CMOS technology. The …
micromachined electrodynamic microphone, made with standard CMOS technology. The …
Optimization of induced voltage from CMOS-compatible MEMS electrodynamic microphone with coaxial planar inductances
This paper presents an improved design of the electrodynamic CMOS-MEMS microphone.
The studied microphone is based on two integrated concentric planar inductors, a fixed …
The studied microphone is based on two integrated concentric planar inductors, a fixed …
A MEMS-based shifted membrane electrodynamic microsensor for microphone applications
In this paper we present a multidisciplinary modeling of a MEMS-based electrodynamic
microsensor, when an additional vertical offset is defined, aiming acoustic applications field …
microsensor, when an additional vertical offset is defined, aiming acoustic applications field …
Mutual Inductance Evaluation Between Two Parallel Conductors on a PCB
In this paper, we present a comprehensive analysis of two parallel conductors, fabricated on
a printed circuit board (PCB), forming an elementary planar transformer, with an emphasis …
a printed circuit board (PCB), forming an elementary planar transformer, with an emphasis …
[PDF][PDF] Numerical magnetic analysis for a monolithic micromachined electrodynamic microphone
In this paper, we present the validation of the theoretical magnetic model of a MEMS
electrodynamic microphone using finite element analysis. This new model aims to predict …
electrodynamic microphone using finite element analysis. This new model aims to predict …
Mechanical modeling and sensitivity evaluation of an electrodynamic MEMS microsensor
In this paper, we present the mechanical modeling of a MEMS electrodynamic microphone
using finite element analysis. This new model aims to study the mechanical design of a …
using finite element analysis. This new model aims to study the mechanical design of a …
Theoretical electromagnetic survey: Application to a CMOS-MEMS planar electrodynamic microphone
F Tounsi - Novel Advances in Microsystems Technologies and …, 2017 - taylorfrancis.com
This chapter presents an electromagnetic comprehensive study of a new micromachined
microphone performed in microelectromechanical systems (MEMS) technology. It serves to …
microphone performed in microelectromechanical systems (MEMS) technology. It serves to …
Dynamic Performance of a Narrow Frequency Band Acoustic Microsensor
In this paper, we present a dynamic modeling of a MEMS microsensor based on
electrodynamic transduction, using both analytic and finite element analysis. Two coaxial …
electrodynamic transduction, using both analytic and finite element analysis. Two coaxial …