Continuous roller nanoimprinting: next generation lithography
Nanoimprint lithography (NIL) is a cost-effective and high-throughput technique for
replicating nanoscale structures that does not require expensive light sources for advanced …
replicating nanoscale structures that does not require expensive light sources for advanced …
[PDF][PDF] Athermal Azobenzene‐Based Nanoimprint Lithography
C Probst, C Meichner, K Kreger, L Kador… - Advanced …, 2016 - researchgate.net
DOI: 10.1002/adma. 201505552 these NIL methods is material shrinkage, either upon
solvent evaporation, cooling, or during curing steps. Azobenzene chromophores possess …
solvent evaporation, cooling, or during curing steps. Azobenzene chromophores possess …
Recent progress in low temperature nanoimprint lithography
H Sun - Microsystem Technologies, 2015 - Springer
Nanoimprint lithography is a low cost and high throughput technology to fabricate
nanostructures with excellent resolution. However, traditional thermal nanoimprint limits its …
nanostructures with excellent resolution. However, traditional thermal nanoimprint limits its …
Fabrication of high-resolution fine microneedles derived from hydrolyzed hyaluronic acid gels in vacuum environment imprinting using water permeable mold
S Miura, R Yamagishi, R Miyazaki, K Yasuda… - Gels, 2022 - mdpi.com
Hydrolyzed hyaluronic acid high-resolution fine microneedles of 13 µm in diameter and 24
µm in height were fabricated from hydrolyzed hyaluronic acid gels made in mixtures of water …
µm in height were fabricated from hydrolyzed hyaluronic acid gels made in mixtures of water …
Oxygen insensitive thiol–ene photo-click chemistry for direct imprint lithography of oxides
R Nagarjuna, MSM Saifullah, R Ganesan - RSC advances, 2018 - pubs.rsc.org
UV-nanoimprint lithography (UV-NIL) is a promising technique for direct fabrication of
functional oxide nanostructures. Since it is mostly carried out in aerobic conditions, the free …
functional oxide nanostructures. Since it is mostly carried out in aerobic conditions, the free …
Ultraviolet nanoimprint lithography using cyclodextrin-based porous template for pattern failure reduction
S Takei, M Hanabata - Applied Physics Letters, 2015 - pubs.aip.org
An approach to ultraviolet (UV) nanoimprint lithography using a cyclodextrin-based porous
template was investigated for the reduction of air trapping and template damage caused by …
template was investigated for the reduction of air trapping and template damage caused by …
[HTML][HTML] Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography
An electron beam (EB) lithography method using inedible cellulose-based resist material
derived from woody biomass has been successfully developed. This method allows the use …
derived from woody biomass has been successfully developed. This method allows the use …
Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography
Nanoimprint lithography (NIL) is a useful technique for nano/micropattern replication. For
ultraviolet-NIL (UV-NIL), the volume shrinkage of the resist upon curing is strongly affected …
ultraviolet-NIL (UV-NIL), the volume shrinkage of the resist upon curing is strongly affected …
Enhanced thermal stability of thermoplastic polymer nanostructures for nanoimprint lithography
Y Jiang, B Luo, X Cheng - Materials, 2019 - mdpi.com
Thermoplastic polymer micro-and nanostructures suffer pattern decay when heated to a
temperature close to or above the polymer's glass transition temperature. In this work, we …
temperature close to or above the polymer's glass transition temperature. In this work, we …
Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing
S Takei, S Nakajima, K Sugahara… - Macromolecular …, 2016 - Wiley Online Library
A gas‐permeable cellulose template for microimprint lithography has been synthesized and
characterized for the reduction of template damage and gas trapping caused by solvents …
characterized for the reduction of template damage and gas trapping caused by solvents …