Continuous roller nanoimprinting: next generation lithography

Z Peng, Y Zhang, CLR Choi, P Zhang, T Wu, YK Chan - Nanoscale, 2023 - pubs.rsc.org
Nanoimprint lithography (NIL) is a cost-effective and high-throughput technique for
replicating nanoscale structures that does not require expensive light sources for advanced …

[PDF][PDF] Athermal Azobenzene‐Based Nanoimprint Lithography

C Probst, C Meichner, K Kreger, L Kador… - Advanced …, 2016 - researchgate.net
DOI: 10.1002/adma. 201505552 these NIL methods is material shrinkage, either upon
solvent evaporation, cooling, or during curing steps. Azobenzene chromophores possess …

Recent progress in low temperature nanoimprint lithography

H Sun - Microsystem Technologies, 2015 - Springer
Nanoimprint lithography is a low cost and high throughput technology to fabricate
nanostructures with excellent resolution. However, traditional thermal nanoimprint limits its …

Fabrication of high-resolution fine microneedles derived from hydrolyzed hyaluronic acid gels in vacuum environment imprinting using water permeable mold

S Miura, R Yamagishi, R Miyazaki, K Yasuda… - Gels, 2022 - mdpi.com
Hydrolyzed hyaluronic acid high-resolution fine microneedles of 13 µm in diameter and 24
µm in height were fabricated from hydrolyzed hyaluronic acid gels made in mixtures of water …

Oxygen insensitive thiol–ene photo-click chemistry for direct imprint lithography of oxides

R Nagarjuna, MSM Saifullah, R Ganesan - RSC advances, 2018 - pubs.rsc.org
UV-nanoimprint lithography (UV-NIL) is a promising technique for direct fabrication of
functional oxide nanostructures. Since it is mostly carried out in aerobic conditions, the free …

Ultraviolet nanoimprint lithography using cyclodextrin-based porous template for pattern failure reduction

S Takei, M Hanabata - Applied Physics Letters, 2015 - pubs.aip.org
An approach to ultraviolet (UV) nanoimprint lithography using a cyclodextrin-based porous
template was investigated for the reduction of air trapping and template damage caused by …

[HTML][HTML] Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography

S Takei, H Maki, K Sugahara, K Ito, M Hanabata - AIP Advances, 2015 - pubs.aip.org
An electron beam (EB) lithography method using inedible cellulose-based resist material
derived from woody biomass has been successfully developed. This method allows the use …

Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography

M Li, Y Chen, W Luo, X Cheng - Journal of Micromechanics and …, 2020 - iopscience.iop.org
Nanoimprint lithography (NIL) is a useful technique for nano/micropattern replication. For
ultraviolet-NIL (UV-NIL), the volume shrinkage of the resist upon curing is strongly affected …

Enhanced thermal stability of thermoplastic polymer nanostructures for nanoimprint lithography

Y Jiang, B Luo, X Cheng - Materials, 2019 - mdpi.com
Thermoplastic polymer micro-and nanostructures suffer pattern decay when heated to a
temperature close to or above the polymer's glass transition temperature. In this work, we …

Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

S Takei, S Nakajima, K Sugahara… - Macromolecular …, 2016 - Wiley Online Library
A gas‐permeable cellulose template for microimprint lithography has been synthesized and
characterized for the reduction of template damage and gas trapping caused by solvents …