Effects of argon gas pressure on its metastable-state density in high-density plasmas

BH Seo, JH Kim, SJ You - Physics of Plasmas, 2015 - pubs.aip.org
The effect of argon gas pressure on its metastable density in inductively coupled plasmas
(ICPs) is investigated by using the laser-induced fluorescence method. Our results show that …

Remote plasma sputtered Al-doped zinc oxide thin films: properties and plasma characteristics

BC Bussell - 2023 - openresearch.surrey.ac.uk
Aluminium zinc oxide (AZO) thin films continue to be important in the diversification and
development of transparent conducting oxide (TCO) based products, particularly those …

A study on the EH mode transition with the line integrated He 23S metastable atom density in an inductively coupled plasma

S Shim, W Lee, JW Park, CH Oh - Current Applied Physics, 2021 - Elsevier
Helium (He) inductively coupled plasma (ICP) was generated by a right-helical-type RF
antenna. At a fixed He pressure of 20 mTorr, the optical emission spectrum from the He …

Metastable argon atoms under significant neutral depletion in helicon plasmas by laser-induced fluorescence

BH Seo, JH Kim, SJ You - Current Applied Physics, 2017 - Elsevier
We study the spatial distribution of the metastable-state argon atoms in high density helicon
plasmas by means of laser-induced fluorescence. It is observed that the neutral argon in …