A Simplified and Wafer-Level Thin Film Characterization of Transverse Piezoelectric Coefficient
C Yang, J He, L Zhao, Z You, A Bao… - 2024 IEEE …, 2024 - ieeexplore.ieee.org
Characterizing material properties of piezoelectric thin films is crucial for optimizing the
design and fabrication of piezoelectric MEMS devices. In this paper, we present a simplified …
design and fabrication of piezoelectric MEMS devices. In this paper, we present a simplified …