Chromium Self-traceable length standard: investigating geometry and diffraction for length traceability chain

Z Lin, Y Yao, Z Xie, D Xue, T Zhou, Z Tang, L Lei… - arXiv preprint arXiv …, 2023 - arxiv.org
Natural constant-based metrology methods offer an effective approach to achieving
traceability in nanometric measurements. The Cr grating, fabricated by atom lithography and …

Optimization and fabrication of chromium grating in self-traceable interferometer

Z Lin, Y Yao, Z Xie, D Xue, T Zhou, Z Tang, L Lei… - Precision …, 2024 - Elsevier
Metrological methods rooted in natural constants present a robust strategy for ensuring
traceability in nanometric measurements. A Chromium (Cr) grating, meticulously constructed …

[PDF][PDF] THE ROLE OF VISUALIZATION AND ERROR CORRECTION IN VERY LARGE AREA, TIP-BASED TOPOGRAPHY MEASUREMENT

LG Connolly, E Natinsky, N Khusnatdinzov, C Jones… - researchgate.net
With technical advances in tip-based measurement tools and increasing market pressures in
the ever-advancing semiconductor industry, both the capabilities and need for nmscale …

Methods for nano-precise overlay in advanced in pick-and-place assembly

P Ajay - 2019 - repositories.lib.utexas.edu
We have explored two nanofabrication techniques in this thesis–Jet-and-Flash Imprint
Lithography (J-FIL), and Nano-precise Modular Assembly of Pre-fabricated blocks (N-MAP) …