Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N 2
mixtures and driven by tailored voltage waveforms are investigated experimentally using a …

We investigate the energy and angular distributions of ions reaching the electrodes in low-
pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as …

Abstract The Electrical Asymmetry Effect (EAE) provides control of the mean ion energy at
the electrodes of multi-frequency capacitively coupled radio frequency plasmas (CCP) by …

Driving radiofrequency capacitively coupled plasmas by multiharmonic tailored voltage
waveforms (TVWs) has been shown to allow considerable control over various plasma …

The charged-particle power absorption dynamics in capacitively coupled plasmas operated
in different CF 4-Ar gas mixtures and driven by tailored voltage waveforms is experimentally …

This research mainly describes the generation and diagnosis of plasma using a wire-plate
discharge device driven by different power supplies, aimed at investigating the effect of …

Cette thèse a été menée au laboratoire GREMI dans le cadre du projet européen Nano2022-
IPCEI, en collaboration avec STMicroelectronics. Le but de cette étude était de développer …

In this work, experimental measurements and analysis of numerical simulations are
performed for capacitively coupled plasmas driven by tailored voltage waveforms under …

The use of non-sinusoidal, Tailored Voltage Waveforms (TVW's, as shown in figure 1) to
excite capacitively coupled radio-frequency (RF) process plasmas has attracted much …

Almost all technological plasmas of interest are confined in some way by material
boundaries. Such boundaries play many important roles, such as being responsible for the …