Silicon nitride nanopores formed by simple chemical etching: DNA translocations and TEM imaging

Z Xia, A Scott, R Keneipp, J Chen, DJ Niedzwiecki… - ACS …, 2022 - ACS Publications
We demonstrate DNA translocations through silicon nitride pores formed by simple chemical
etching on glass substrates using microscopic amounts of hydrofluoric acid. DNA …

Strain and defects in Si-doped (Al) GaN epitaxial layers

K Forghani, L Schade, UT Schwarz, F Lipski… - Journal of Applied …, 2012 - pubs.aip.org
Si is the most common dopant in (Al) GaN based devices acting as a donor. It has been
observed that Si induces tensile strain in (Al) GaN films, which leads to an increasing …

Growth and characterization of PALE Si-doped AlN on sapphire substrate by MOVPE

KM Pürlü, MN Kocak, G Yolcu, I Perkitel… - Materials Science in …, 2022 - Elsevier
In this study, we report different SiH 4 flow condition effects on crystal, surface, optical, and
electrical characteristics of heteroepitaxial Metal-Organic Vapor Phase Epitaxy (MOVPE) …

Improving Transport Properties of GaN-Based HEMT on Si (111) by Controlling SiH4 Flow Rate of the SiNx Nano-Mask

JJ Dai, CW Liu, SK Wu, SH Huynh, JG Jiang, SA Yen… - Coatings, 2020 - mdpi.com
The AlGaN/AlN/GaN high electron mobility transistor structures were grown on a Si (111)
substrate by metalorganic chemical vapor deposition in combination with the insertion of a …

Observation of reaction between a-type dislocations in GaN layer grown on 4-in. Si (111) substrate with AlGaN/AlN strained layer superlattice after dislocation …

Y Sugawara, Y Ishikawa, A Watanabe, M Miyoshi… - Journal of Crystal …, 2017 - Elsevier
Dislocation reaction in a GaN layer grown on 4-in. Si (111) with AlGaN/AlN strained layer
superlattice was observed by transmission electron microscopy. The reaction between a …

Improved characteristics of (11 2‾ 2) plane AlGaN films grown on SiNx interlayer

Q Dai, X Zhang, L Zhang, Z Qi, P Chen… - Materials Science in …, 2024 - Elsevier
SiN x interlayer was introduced in the epitaxial process of (11 2‾ 2) AlGaN film, and the
influences of SiN x on the properties of (11 2‾ 2) AlGaN were characterized. It was revealed …

Inhomogeneous distribution of defect-related emission in Si-doped AlGaN epitaxial layers with different Al content and Si concentration

S Kurai, F Ushijima, H Miyake, K Hiramatsu… - Journal of applied …, 2014 - pubs.aip.org
The spatial distribution of luminescence in Si-doped AlGaN epitaxial layers that differ in Al
content and Si concentration has been studied by cathodoluminescence (CL) mapping in …

High resolution synchrotron X-ray studies of phase separation phenomena and the scaling law for the threading dislocation densities reduction in high quality AlGaN …

S Lazarev, S Bauer, K Forghani, M Barchuk… - Journal of crystal …, 2013 - Elsevier
High resolution X-ray coplanar (symmetric X-ray diffraction (SXRD) and asymmetric X-ray
diffraction (ASXRD)) and non-coplanar diffraction (grazing incidence diffraction (GID)) have …

Origin of surface defects and influence of an in situ deposited SiN nanomask on the properties of strained AlGaN/GaN heterostructures grown on Si (111) using metal …

T Szymański, M Wośko, M Wzorek, B Paszkiewicz… - …, 2016 - pubs.rsc.org
Herein, the investigation of the defects present on the surface of strained AlGaN/GaN
heterostructures grown on Si (111), with and without an in situ deposited SixNx nanomask …

Molecular beam epitaxy and characterization of Al0. 6Ga0. 4N epilayers

DA Laleyan, X Liu, A Pandey, WJ Shin, ET Reid… - Journal of Crystal …, 2019 - Elsevier
We have performed a detailed investigation of the molecular beam epitaxy of AlGaN
epilayers on AlN template on sapphire substrate. The effects of various growth parameters …