Excimer laser processing of indium‐tin‐oxide films: an optical investigation

T Szörényi, LD Laude, I Bertoti, Z Kantor… - Journal of Applied …, 1995 - pubs.aip.org
accepted for publication 1 August 1995) dc sputtered indium-tin-oxide films have been
excimer laser irradiated at subablation threshold tluences (< 510 mJ/cm'). Optical …

Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films

O Yavas, M Takai - Journal of Applied Physics, 1999 - pubs.aip.org
Maskless laser patterning of indium tin oxide thin films for flat panel display applications was
studied as a function of wavelength using different harmonics of a diode-pumped Q …

Solution-processed metal oxide arrays using femtosecond laser ablation and annealing for thin-film transistors

C Chen, G Chen, H Yang, G Zhang, D Hu… - Journal of Materials …, 2017 - pubs.rsc.org
In this study, a femtosecond (fs) laser is proposed to pattern and anneal a metal oxide active
layer for the facile fabrication of metal oxide thin-film transistor (TFT) arrays. Compared with …

Time-resolved ultrafast laser ablation dynamics of thin film indium tin oxide

GE Hallum, D Kürschner, D Redka, D Niethammer… - Optics express, 2021 - opg.optica.org
The interaction of ultrashort laser pulses above the ablation threshold of thin-film indium tin
oxide (ITO) is examined with pump-probe microscopy. We are able to observe …

A novel approach to prepare zinc oxide films: excimer laser irradiation of sol–gel derived precursor films

T Nagase, T Ooie, J Sakakibara - Thin Solid Films, 1999 - Elsevier
Crystalline zinc oxide films with a c-axis orientation were prepared by a new approach using
KrF excimer laser irradiation of sol–gel derived precursor films on glass substrates. The …

Excimer laser micromachining of indium tin oxide for fabrication of optically transparent metamaterial absorbers

G Singh, H Sheokand, S Ghosh, KV Srivastava… - Applied Physics A, 2019 - Springer
Excimer laser micromachining has been extensively studied to machine Indium Tin oxide
which is uniformly deposited over PET to realize transparent broadband metamaterial …

Incubation effect and its influence on laser patterning of ITO thin film

S Xiao, EL Gurevich, A Ostendorf - Applied Physics A, 2012 - Springer
Results are presented on the surface damage thresholds of ITO thin films induced by single-
and multi-pulse laser irradiation at a pulse duration of 10 ps and a wavelength of 1064 nm …

High-speed maskless laser patterning of indium tin oxide thin films

O Yavas, M Takai - Applied Physics Letters, 1998 - pubs.aip.org
Patterning characteristics of indium tin oxide thin films using different wavelengths of a diode-
pumped Q-switched Nd: YLF and a flashlamp-pumped Nd: YAG laser have been studied …

Excimer laser sintering of indium tin oxide nanoparticles for fabricating thin films of variable thickness on flexible substrates

T Park, D Kim - Thin Solid Films, 2015 - Elsevier
Technology to fabricate electrically-conducting, transparent thin-film patterns on flexible
substrates has possible applications in flexible electronics. In this work, a pulsed-laser …

Simplified large‐area manufacturing of organic electrochemical transistors combining printing and a self‐aligning laser ablation step

T Blaudeck, PA Ersman, M Sandberg… - Advanced Functional …, 2012 - Wiley Online Library
A hybrid manufacturing approach for organic electrochemical transistors (OECTs) on flexible
substrates is reported. The technology is based on conventional and digital printing (screen …