The development of a new piezoresistive pressure sensor for low pressures
This paper presents the design methodology and fabrication process of a novel
piezoresistive pressure sensor with a combined cross-beam membrane and peninsula …
piezoresistive pressure sensor with a combined cross-beam membrane and peninsula …
Mechanical structural design of a piezoresistive pressure sensor for low-pressure measurement: A computational analysis by increases in the sensor sensitivity
This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive
pressure sensor with a four-petal membrane combined with narrow beams and a center …
pressure sensor with a four-petal membrane combined with narrow beams and a center …
Effects of temperature and residual stresses on the output characteristics of a piezoresistive pressure sensor
The effects of temperature on the output performance of piezoresistive pressure sensors are
studied in this paper. The influences of the environmental temperature, the residual stress …
studied in this paper. The influences of the environmental temperature, the residual stress …
Design and integration of flexible sensor matrix for in situ monitoring of polymer composites
Sensory polymer composites are highly desirable for applications such as in situ and real-
time production processes and structural health monitoring, and for technologies that …
time production processes and structural health monitoring, and for technologies that …
Performance study of MEMS piezoresistive pressure sensors at elevated temperatures
V Belwanshi, S Philip, A Topkar - IEEE Sensors Journal, 2022 - ieeexplore.ieee.org
Three types of piezoresistive pressure sensors were designed and fabricated using different
process technologies incorporating standard diffused piezoresistors, and oxide isolated …
process technologies incorporating standard diffused piezoresistors, and oxide isolated …
Design and fabrication of a high-temperature SOI pressure sensor with optimized crossbeam membrane
L Hao, C Li, L Wang, B Bai, Y Zhao, C Luo - Micromachines, 2023 - mdpi.com
This paper presents a SOI piezoresistive pressure sensor with the crossbeam membrane.
The roots of the crossbeam were widened, which solved the problem of the poor dynamic …
The roots of the crossbeam were widened, which solved the problem of the poor dynamic …
Design and optimization of a pressure sensor based on serpentine-shaped graphene piezoresistors for measuring low pressure
X Ren, X Liu, X Su, X Jiang - Sensors, 2022 - mdpi.com
This thesis describes a novel microelectromechanical system (MEMS) piezoresistive
pressure sensor based on serpentine-shaped graphene piezoresistors paired with …
pressure sensor based on serpentine-shaped graphene piezoresistors paired with …
Self-calibration and performance control of MEMS with applications for IoT
J Clark - Sensors, 2018 - mdpi.com
A systemic problem for microelectromechanical systems (MEMS) has been the large gap
between their predicted and actual performances. Due to process variations, no two MEMS …
between their predicted and actual performances. Due to process variations, no two MEMS …
Influence of the pressure range on temperature coefficient of resistivity (TCR) for polysilicon piezoresistive MEMS pressure sensor
Sensitivity with respect to physical change of any type of sensor depends upon structure of
the sensor and sensing material. If sensor is sensitive with more than single physical change …
the sensor and sensing material. If sensor is sensitive with more than single physical change …
Torsion sensing on a cylinder using a flexible piezoelectric wrist band
A wrist band undergoes torsional loads during twisting motions of the human forearm. In this
article, we investigate sensing torsional loads on a silicone cylinder using a wrist band …
article, we investigate sensing torsional loads on a silicone cylinder using a wrist band …