X-ray lithography has been first proposed almost 50 years ago, and the related LIGA
process around 25 years ago. It is therefore a good time to make an analysis of the …

Multiphoton polymer cross-linking evolves as the core process behind high-resolution
additive microfabrication with soft materials for implantable/wearable electronics, tissue …

Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

Focused soft X-ray beam induced deposition of metallic deposits from metal organic
precursors is a promising novel technique for additive nanostructure fabrication. In the …

The irradiation with photons or electrons can dramatically influence the chemical stability of
a molecule, either free or adsorbed on a surface, inducing its fragmentation or desorption …

We report on the near edge x-ray absorption fine structure (NEXAFS) spectroscopy of hybrid
organic–inorganic resists. These materials are nonchemically amplified systems based on …

Focused X-ray beam induced deposition is a recently developed approach for fabrication of
metallic nanostructures by selective activation of metal-organic precursors with the focused …

Focused X-ray beam induced deposition (FXBID) is a maskless direct-write technique that
combines the concepts of focused electron beam induced deposition (FEBID) and X-ray …