Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

In this paper, we review the high-resolution, micromachined accelerometers by enunciating
the development of their mechanical components, the electronic circuitry and the …

Micro-cantilever beams interact with fluids in static or dynamic modes for several
applications with different research purposes. Various theoretical studies are performed …

We design and fabricate electrostatically actuated micro-speakers with circular diaphragms
and peripheral electrode configuration. The novel electrode configuration mitigates the …

We report a new approach for designing high-performance microelectromechanical system
(MEMS) electromagnetic energy harvesting devices, which can operate at low frequency (<; …

High isolation and low insertion loss is highly regarded for the devices designed for high
frequency applications. A compact radio-frequency microelectromechanical systems switch …

Wide‐bandgap semiconductors represent an attractive option to meet the increasing
demands of micro‐and nano‐electromechanical systems (MEMS/NEMS) by offering new …

In this work, we present a monolithic finite-element-based strategy for problems involving the
deformation of a hyperelastic solid, an incompressible fluid and electrostatics. We use a two …

In this work, we report on a novel simple yet robust two-mask metal-on-insulator (MOI)
process and illustrate its implementation for the fabrication of a meso scale MEMS inertial …

Squeezed air film between two closely spaced vibrating microstructures is the important
source of energy dissipation and has profound effects on the dynamics of …