We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

This paper presents a 77.7-MHz silicon microelectromechanical-systems oven-controlled
oscillator (MEMS OCXO) that uses the structural resistance (R Struc) of the resonator as an …

This paper reports on the design and electrical characterization of a single crystal silicon
micromechanical square-plate resonator. The microresonator has been excited in the anti …

This paper presents a review of micro-electromechanical devices for frequency references
and RF spectral processing. The application of high-Q pure silicon and AlN-on-silicon bulk …

This paper reports on the demonstration of series tuning for lateral micromechanical
oscillators and its application for electronic temperature compensation of piezoelectric …

This work demonstrates a lateral overtone bulk acoustic resonator (LOBAR), which consists
of an aluminum nitride (AlN) transducer coupled to a suspended thin silicon carbide (SiC) …

This paper describes prototype temperature compensated piezoelectric MEMS oscillators
operating in the wide temperature range of-40° C to 85° C for RTC applications. The AlN-on …

This work presents a micro-ovenized 77.7 MHz silicon MEMS oscillator using resonator's
structural resistance as an embedded temperature sensor. The structural resistance of a …

An oscillator employing a polycrystalline 3C silicon carbide (3C-SiC) folded-beam
microelectromechanical resonator as a frequency-setting component with silicon discrete …

We present a new temperature compensation system for microresonator based frequency
references. It consists of a phase lock loop whose inputs are derived from two …