Formation of high aspect ratio GaAs nanostructures with metal-assisted chemical etching

M DeJarld, JC Shin, W Chern, D Chanda… - Nano …, 2011 - ACS Publications
Periodic high aspect ratio GaAs nanopillars with widths in the range of 500–1000 nm are
produced by metal-assisted chemical etching (MacEtch) using n-type (100) GaAs substrates …

Electrically‐Driven Photonic Crystal Lasers with Ultra‐low Threshold

E Dimopoulos, A Sakanas… - Laser & Photonics …, 2022 - Wiley Online Library
Light sources with ultra‐low energy consumption and high performance are required to
realize optical interconnects for on‐chip communication. Photonic crystal (PhC) nanocavity …

[图书][B] III-V integrated circuit fabrication technology

S Tiku, D Biswas - 2016 - books.google.com
GaAs processing has reached a mature stage. New semiconductor compounds are
emerging that will dominate future materials and device research, although the processing …

High Q factor InP photonic crystal nanobeam cavities on silicon wire waveguides

G Crosnier, D Sanchez, A Bazin, P Monnier… - Optics letters, 2016 - opg.optica.org
High-quality (Q) factor indium phosphide (InP)-based 1D photonic crystal nanobeam cavities
are fabricated on silicon on insulator waveguides. Through the optimization of the fabrication …

Purcell effect in photonic crystal microcavities embedding InAs/InP quantum wires

J Canet-Ferrer, LJ Martínez, I Prieto, B Alén… - Optics …, 2012 - opg.optica.org
The spontaneous emission rate and Purcell factor of self-assembled quantum wires
embedded in photonic crystal micro-cavities are measured at 80 K by using micro …

Room temperature continuous wave operation in a photonic crystal microcavity laser with a single layer of InAs/InP self-assembled quantum wires

L Javier Martinez, B Alén, I Prieto, D Fuster… - Optics express, 2009 - opg.optica.org
We present continuous wave laser emission in a photonic crystal microcavity operating at
1.5 µ m at room temperature. The structures have been fabricated in an InP slab including a …

Metal assisted chemical etching to produce III-V semiconductor nanostructures

X Li, MT Dejarld, JC Shin, W Chern - US Patent 8,951,430, 2015 - Google Patents
Methods of metal assisted chemical etching III-V semicon ductors are provided. The
methods can include providing an electrically conductive film pattern disposed on a semicon …

Two-dimensional surface emitting photonic crystal laser with hybrid triangular-graphite structure

L Javier Martinez, B Alén, I Prieto, JF Galisteo-López… - Optics express, 2009 - opg.optica.org
We present laser emission of a compact surface-emitting micro laser, optical pumped and
operating at 1.5 µ m at room temperature. A two-dimensional photonic crystal lattice …

Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching

IP González, LE Muñoz Camuñez… - Journal of Vacuum …, 2014 - pubs.aip.org
The authors demonstrate high quality factor GaAs-based L9 photonic crystal microcavities
(PCMs) with embedded InAsSb quantum dots with emission in 1.3 μm at room temperature …

Excitation power dependence of the Purcell effect in photonic crystal microcavity lasers with quantum wires

J Canet-Ferrer, I Prieto, G Muñoz-Matutano… - Applied Physics …, 2013 - pubs.aip.org
The Purcell effect dependence on the excitation power is studied in photonic crystal
microcavity lasers embedding InAs/InP quantum wires. In the case of non-lasing modes, the …