Atomic layer deposition of stable 2D materials
Following the graphene isolation, strong interest in two dimensional (2D) materials has been
driven by their outstanding properties. Their typical intrinsic structure, including strong in …
driven by their outstanding properties. Their typical intrinsic structure, including strong in …
Catalyst design with atomic layer deposition
Atomic layer deposition (ALD) has emerged as an interesting tool for the atomically precise
design and synthesis of catalytic materials. Herein, we discuss examples in which the atomic …
design and synthesis of catalytic materials. Herein, we discuss examples in which the atomic …
Atomic layer deposition of two-dimensional layered materials: processes, growth mechanisms, and characteristics
Since the discovery of graphene, there has been an ever-increasing interest in two-
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …
dimensional (2D) layered materials with exceptional properties. To this end, a variety of …
Wafer-scale growth of MoS 2 thin films by atomic layer deposition
The wafer-scale synthesis of MoS2 layers with precise thickness controllability and excellent
uniformity is essential for their application in the nanoelectronics industry. Here, we …
uniformity is essential for their application in the nanoelectronics industry. Here, we …
Advances in scalable gas-phase manufacturing and processing of nanostructured solids: A review
Although the gas-phase production of nanostructured solids has already been carried out in
industry for decades, only in recent years has research interest in this topic begun to …
industry for decades, only in recent years has research interest in this topic begun to …
Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)6 and NH3 and Its Diffusion Barrier Application
Deposition providing precise control of the film thickness, low deposition temperature, and
noncorrosive byproducts is essential for the efficient fabrication of barrier layers in …
noncorrosive byproducts is essential for the efficient fabrication of barrier layers in …
Tuning acid–base properties using Mg–Al oxide atomic layer deposition
Atomic layer deposition (ALD) was used to coat γ-Al2O3 particles with oxide films of varying
Mg/Al atomic ratios, which resulted in systematic variation of the acid and base site areal …
Mg/Al atomic ratios, which resulted in systematic variation of the acid and base site areal …
[HTML][HTML] Plasma-enhanced atomic layer deposition of WO3-SiO2 films using a heteronuclear precursor
K Mullapudi, KEK Holden, JL Peterson… - Journal of Vacuum …, 2023 - pubs.aip.org
Tungsten oxide–silicon dioxide (WO x–SiO y) composite thin films were deposited for the
first time via the remote oxygen plasma-enhanced atomic layer deposition (ALD) process …
first time via the remote oxygen plasma-enhanced atomic layer deposition (ALD) process …
Electrochemically active dispersed tungsten oxides obtained from tungsten hexacarbonyl in supercritical carbon dioxide
AY Nikolaev, AA Khokhlov, EE Levin… - Journal of Materials …, 2019 - Springer
Electrochemically active nanocrystalline tungsten oxide was synthesized in supercritical
carbon dioxide from tungsten hexacarbonyl at 150° C and 400 bar in the presence of …
carbon dioxide from tungsten hexacarbonyl at 150° C and 400 bar in the presence of …