Heteroepitaxial growth of III-V semiconductors on silicon

JS Park, M Tang, S Chen, H Liu - Crystals, 2020 - mdpi.com
Monolithic integration of III-V semiconductor devices on Silicon (Si) has long been of great
interest in photonic integrated circuits (PICs), as well as traditional integrated circuits (ICs) …

Atomic layer epitaxy

T Suntola - Materials Science Reports, 1989 - Elsevier
This review discusses the development and present status of atomic layer epitaxy (ALE), a
technology for growing layers of crystalline and polycrystalline materials one atomic layer at …

[图书][B] Epitaxy of semiconductors

UW Pohl - 2020 - Springer
This introductory chapter provides a brief survey on the development of epitaxial growth
techniques and points out tasks for the epitaxy of device structures. Starting from early …

Fabrication of GaAs quantum dots by modified droplet epitaxy

K Watanabe, N Koguchi, Y Gotoh - Japanese Journal of Applied …, 2000 - iopscience.iop.org
We propose a modified droplet epitaxy method for fabricating self-organized GaAs/AlGaAs
quantum dots (QDs) with a high As flux irradiation and a low substrate temperature. By our …

[图书][B] Epitaxy of nanostructures

V Shchukin, NN Ledentsov, D Bimberg - 2004 - books.google.com
The general trend in modern solid state physics and technology is to make things smaller.
The size of key elements in modern devices approaches the nanometer scale, for both …

Growth of homoepitaxial SrTiO3 thin films by molecular-beam epitaxy

CM Brooks, L Kourkoutis, T Heeg, J Schubert… - Applied physics …, 2009 - pubs.aip.org
We report the structural properties of homoepitaxial (100) SrTiO 3 films grown by reactive
molecular-beam epitaxy (MBE). The lattice spacing and x-ray diffraction (XRD) rocking …

Growth of GaAs epitaxial microcrystals on an S-terminated GaAs substrate by successive irradiation of Ga and As molecular beams

NKN Koguchi, KIK Ishige - Japanese journal of applied physics, 1993 - iopscience.iop.org
Numerous GaAs epitaxial microcrystals with an average base size of 250 Å× 430 Å with
(111) facets were fabricated on a sulfur-terminated (S-terminated) GaAs (001) substrate with …

RHEED Intensity Oscillations for the Stoichiometric Growth of SrTiO3 Thin Films by Reactive Molecular Beam Epitaxy

JH Haeni, CD Theis, DG Schlom - Journal of Electroceramics, 2000 - Springer
The growth of high quality multicomponent oxide thin films by reactive molecular beam
epitaxy (MBE) requires precise composition control. We report the use of in situ reflection …

Oxide nano-engineering using MBE

DG Schlom, JH Haeni, J Lettieri, CD Theis… - Materials Science and …, 2001 - Elsevier
Molecular beam epitaxy (MBE) has achieved unparalleled control in the integration of
semiconductors at the nanometer level; its use for the integration of oxides with similar …

Artificially layered heteropolytypic structures based on SiC polytypes: molecular beam epitaxy, characterization and properties

A Fissel - Physics reports, 2003 - Elsevier
In recent years, new types of semiconductor heterostructures consisting of only one material
in different crystal structures, such as wurtzite/zinc-blende heterostructures (heteropolytypic …