The increasing demand for low loss, high Q devices for high frequency applications has led
to the development of MEMS components in the RF domain. RF MEMS has evolved over the …

Gas breakdown in microelectromechanical system capacitive switches is demonstrated
using high resolution current measurements and by particle-in-cell/Monte Carlo collision …

The paper presents a systematic investigation of dielectric charging in low temperature
silicon nitride for RF-MEMS capacitive switches. The dielectric charging is investigated with …

The paper investigates the dependence of charging process on the dielectric charging of
radiation induced defects in Si3N4 and SiO2 dielectric films, which are used in RF-MEMS …

The dielectric charging in RF MEMS capacitive switches is modeled. The modeling focus on
charge injections processes and the calculations start from first principles. The calculations …

A study of field emission process in MEMS-based capacitor/switch-like geometries is
presented. High resolution current–voltage characteristics up to breakdown have been …

An improved method to study the long term discharge current through the dielectric film in
microelectromechanical system capacitive switches is presented. The method allows the …

In this work, we investigate the charging and reliability of interlayer dielectric materials that
are used in the fabrication process of advanced RF-MEMS switches. In particular, the charge …

In this paper, the reliability of shunt capacitive radio frequency microelectromechanical
systems switches developed on GaAs substrate using a III-V technology fabrication process …

The paper attempts to elaborate on the basic problem of dielectric charging in insulating
films for microelectromechanical capacitive switches, the dependence of the film electrical …