3D printing of functional microrobots

J Li, M Pumera - Chemical Society Reviews, 2021 - pubs.rsc.org
3D printing (also called “additive manufacturing” or “rapid prototyping”) is able to translate
computer-aided and designed virtual 3D models into 3D tangible constructs/objects through …

Two-photon lithography for three-dimensional fabrication in micro/nanoscale regime: A comprehensive review

V Harinarayana, YC Shin - Optics & Laser Technology, 2021 - Elsevier
With the advent of femtosecond lasers in the early 1990s, ultrafast laser processing has
proven to be an imperative tool for micro/nano machining. Two-photon lithography (TPL) is …

Polymerization mechanisms initiated by spatio-temporally confined light

E Skliutas, M Lebedevaite, E Kabouraki… - …, 2021 - degruyter.com
Ultrafast laser 3D lithography based on non-linear light–matter interactions, widely known as
multi-photon lithography (MPL), offers unrivaled precision rapid prototyping and flexible …

Two decades of two-photon lithography: Materials science perspective for additive manufacturing of 2D/3D nano-microstructures

A Jaiswal, CK Rastogi, S Rani, GP Singh, S Saxena… - Iscience, 2023 - cell.com
Two-photon lithography (TPL) is a versatile technology for additive manufacturing of 2D and
3D micro/nanostructures with sub-wavelength resolved features. Recent advancement in …

Polymer microfabrication technologies for microfluidic systems

H Becker, C Gärtner - Analytical and bioanalytical chemistry, 2008 - Springer
Polymers have assumed the leading role as substrate materials for microfluidic devices in
recent years. They offer a broad range of material parameters as well as material and …

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

A del Campo, C Greiner - Journal of micromechanics and …, 2007 - iopscience.iop.org
SU-8 has become the favourite photoresist for high-aspect-ratio (HAR) and three-
dimensional (3D) lithographic patterning due to its excellent coating, planarization and …

Multiphoton fabrication

CN LaFratta, JT Fourkas, T Baldacchini… - Angewandte Chemie …, 2007 - Wiley Online Library
Chemical and physical processes driven by multiphoton absorption make possible the
fabrication of complex, 3D structures with feature sizes as small as 100 nm. Since its …

Two-photon polymerization: Functionalized microstructures, micro-resonators, and bio-scaffolds

AJG Otuka, NB Tomazio, KT Paula, CR Mendonça - Polymers, 2021 - mdpi.com
The direct laser writing technique based on two-photon polymerization (TPP) has evolved
considerably over the past two decades. Its remarkable characteristics, such as 3D …

Toward nanometer-scale optical photolithography: utilizing the near-field of bowtie optical nanoantennas

A Sundaramurthy, PJ Schuck, NR Conley… - Nano …, 2006 - ACS Publications
Optically resonant metallic bowtie nanoantennas are utilized as fabrication tools for the first
time, resulting in the production of polymer resist nanostructures< 30 nm in diameter at …

Review of polymer MEMS micromachining

BJ Kim, E Meng - Journal of Micromechanics and …, 2015 - iopscience.iop.org
The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …