Magnetron sputtered thin films based on transition metal nitride: structure and properties

SB Ghantasala, S Sharma - physica status solidi (a), 2023 - Wiley Online Library
Transition metal nitride (TMN) thin films exhibit outstanding physical, chemical, and
mechanical properties, making them best suitable for a wide variety of applications. The …

Tailoring properties of hafnium nitride thin film via reactive gas-timing RF magnetron sputtering for surface enhanced-raman scattering substrates

N Sucheewa, W Wongwiriyapan, A Klamchuen… - Crystals, 2022 - mdpi.com
This study successfully demonstrated the tailoring properties of hafnium nitride (HfN) thin
films via reactive gas-timing (RGT) RF magnetron sputtering for surface-enhanced Raman …

Flexible and Disposable Hafnium Nitride Extended Gates Fabricated by Low-Temperature High-Power Impulse Magnetron Sputtering

CM Yang, CH Wei, JY Chang, CS Lai - Nanomaterials, 2024 - pmc.ncbi.nlm.nih.gov
To obtain a high-performance extended gate field-effect transistor for pH detection, hafnium
nitride (HfN) was first fabricated on an indium tin oxide on polyethylene terephthalate …

Formation of HfOxNy nanorod GLAD films growth by rapid thermal oxidation

W Phae-Ngam, J Prathumsit, C Chananonnawathorn… - Vacuum, 2023 - Elsevier
In this work, the hafnium oxynitride (HfON) nanorod films on p-type silicon (Si) wafer
substrate have been fabricated by reactive magnetron sputtering with glancing angle …

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

W Phae-ngam, T Lertvanithphol… - Materials Today …, 2021 - Elsevier
Crystalline hafnium nitride (HfN) thin films were successfully prepared by direct current (DC)
reactive magnetron sputtering on a silicon substrate at room temperature. The effects of …

SURFACE-ENHANCED RAMAN SCATTERING ACTIVITY OF PLASMONIC Ag–Ti NANOISLAND FILMS

W Phae-Ngam, T Rattana, S Sujinnapram… - Surface Review and …, 2021 - World Scientific
Bimetallic nanostructure of noble metals is an alternative material that can provide the
tenability of plasmonic performance. In this study, the plasmonic silver–titanium nanoisland …