Transparent semiconducting oxides: Materials and devices
M Grundmann, H Frenzel, A Lajn… - … status solidi (a), 2010 - Wiley Online Library
Transparent conductive oxides (TCOs) are a well‐known material class allowing Ohmic
conduction. A large free carrier concentration in the 1021 cm− 3 range and high conductivity …
conduction. A large free carrier concentration in the 1021 cm− 3 range and high conductivity …
Effect of N2O plasma treatment on the performance of ZnO TFTs
Postfabrication rapid thermal annealing (RTA) and subsequent nitrous oxide plasma
treatment improved the performance of zinc oxide (ZnO) thin-film transistors (TFTs) in terms …
treatment improved the performance of zinc oxide (ZnO) thin-film transistors (TFTs) in terms …
A comparison of zinc oxide thin-film transistors on silicon oxide and silicon nitride gate dielectrics
PF Carcia, RS McLean, MH Reilly… - Journal of Applied …, 2007 - pubs.aip.org
We compared the properties of ZnO thin-film transistors in the inverted coplanar geometry on
thermally grown silicon oxide gate dielectric to devices on silicon nitride, grown by plasma …
thermally grown silicon oxide gate dielectric to devices on silicon nitride, grown by plasma …
Effect of oxygen partial pressure during pulsed laser deposition on the emission of Eu doped ZnO thin films
Abstract Eu 3+ doped ZnO (ZnO: Eu 3+) thin films were prepared by pulsed laser deposition
at different oxygen partial pressures. The all ZnO: Eu 3+ thin films have a hexagonal …
at different oxygen partial pressures. The all ZnO: Eu 3+ thin films have a hexagonal …
Application of DC magnetron sputtering to deposition of InGaZnO films for thin film transistor devices
YK Moon, S Lee, DH Kim, DH Lee… - Japanese Journal of …, 2009 - iopscience.iop.org
This is the first report demonstrating that InGaZnO (IGZO) thin films deposited using DC
magnetron sputtering can be used for the active channel layer of a thin film transistor (TFT) …
magnetron sputtering can be used for the active channel layer of a thin film transistor (TFT) …
Fabrication and characterization of ultra-thin ZnO based bottom gate thin film transistor for UV detection
An RF sputtered ZnO thin film was utilized in a thin film transistor (TFT) fabrication. The film
was fabricated on SiO 2 gate oxide that was thermally grown on Si Substrate. Few …
was fabricated on SiO 2 gate oxide that was thermally grown on Si Substrate. Few …
Improvement of Pt Schottky contacts to n-type ZnO by KrF excimer laser irradiation
High quality Pt Schottky contact to n-type ZnO was formed using KrF excimer laser. A pulsed
laser irradiation of n-type ZnO in O 2 pressure of 0.1 Mtorr, prior to Pt metal deposition …
laser irradiation of n-type ZnO in O 2 pressure of 0.1 Mtorr, prior to Pt metal deposition …
Gamma ray and neutron radiation effects on the electrical and structural properties of n-ZnO/p-CuGaO2 Schottky diode
This research focuses on the radiation tolerance of ZnO and CuGaO 2 based semiconductor
application for space borne application. In this research, n-ZnO/p-CuGaO 2 based …
application for space borne application. In this research, n-ZnO/p-CuGaO 2 based …
ZnO based transparent thin film transistor grown by aerosol assisted CVD
The communication reports the characterization of n^++-Al: ZnO/Al _2 2 O _3 3/n-ZnO thin
film transistors (TFTs) developed by using an indigenously designed low-cost aerosol …
film transistors (TFTs) developed by using an indigenously designed low-cost aerosol …
ZnO-based metal-semiconductor field-effect transistors with Ag-, Pt-, Pd-, and Au-Schottky gates
H Frenzel, A Lajn, H von Wenckstern, G Biehne… - Thin Solid Films, 2009 - Elsevier
Metal-semiconductor field-effect transistors (MESFETs) were fabricated by reactive dc
sputtering of either Ag, Pt, Pd, and Au as Schottky gate contacts on ZnO thin films grown by …
sputtering of either Ag, Pt, Pd, and Au as Schottky gate contacts on ZnO thin films grown by …