[HTML][HTML] Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

YQ Fu, JK Luo, NT Nguyen, AJ Walton… - Progress in Materials …, 2017 - Elsevier
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

Thermal Conductivity of β-Phase Ga2O3 and (AlxGa1–x)2O3 Heteroepitaxial Thin Films

Y Song, P Ranga, Y Zhang, Z Feng… - … applied materials & …, 2021 - ACS Publications
Heteroepitaxy of β-phase gallium oxide (β-Ga2O3) thin films on foreign substrates shows
promise for the development of next-generation deep ultraviolet solar blind photodetectors …

Super-high-frequency SAW resonators on AlN/diamond

JG Rodriguez-Madrid, GF Iriarte… - IEEE Electron device …, 2012 - ieeexplore.ieee.org
This letter describes the procedure to manufacture high-performance surface acoustic wave
(SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz …

Single-crystalline LiNbO3 film based wideband SAW devices with spurious-free responses for future RF front-ends

X He, K Chen, L Kong, P Li - Applied Physics Letters, 2022 - pubs.aip.org
This work demonstrates super-high frequency wave-guided surface acoustic wave (SAW)
devices based on LiNbO 3/SiO 2/Si layered substrates. SAW resonators with fundamental …

GaN/Si based single SAW resonator temperature sensor operating in the GHz frequency range

A Müller, G Konstantinidis, V Buiculescu… - Sensors and Actuators A …, 2014 - Elsevier
The paper presents the manufacturing and characterization of GaN based SAW (surface
acoustic wave) type temperature sensors. In contrast with most SAW sensor structures …

Sezawa propagation mode in GaN on Si surface acoustic wave type temperature sensor structures operating at GHz frequencies

A Müller, I Giangu, A Stavrinidis… - IEEE Electron …, 2015 - ieeexplore.ieee.org
This letter investigates the applicability of Sezawa propagation mode for various GaN/Si
surface acoustic wave (SAW) temperature sensor structures. First, different acoustic …

GaN membrane supported SAW pressure sensors with embedded temperature sensing capability

A Müller, G Konstantinidis, I Giangu… - IEEE Sensors …, 2017 - ieeexplore.ieee.org
This paper presents the fabrication and characterization of a GHz operating surface acoustic
wave (SAW)-based pressure sensor on a 1.2-μm-thin GaN membrane. Two types of …

[HTML][HTML] Acoustoelectric amplification of Rayleigh waves in low sheet density AlGaN/GaN heterostructures on sapphire

S Ghosh, MA Hollis, RJ Molnar - Applied Physics Letters, 2019 - pubs.aip.org
This letter demonstrates amplification of surface acoustic waves through the application of
dc electric fields in low sheet density heterostructures of Al x Ga 1− x N barrier layers over …

High quality factor surface Fabry-Perot cavity of acoustic waves

Y Xu, W Fu, C Zou, Z Shen, HX Tang - Applied Physics Letters, 2018 - pubs.aip.org
Surface acoustic wave (SAW) resonators are critical components in wireless
communications and many sensing applications. They have also recently emerged as a …

SAW devices manufactured on GaN/Si for frequencies beyond 5 GHz

A Müller, D Neculoiu, G Konstantinidis… - IEEE Electron …, 2010 - ieeexplore.ieee.org
This letter describes the manufacture and characterization of surface acoustic wave (SAW)
devices on GaN/Si devoted to applications above the 5-GHz frequency range. The SAW …