A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

This paper refers to a silicon micromachined tuning fork gyroscope, which is driven via two
piezoelectric thin film actuators. The device responds to an external angular rate by a …

The detection capacitance analysis method based on the elastic body model for the tuning
fork vibratory micromachined gyroscope is first put forward to improve the analytical …

以微机械加工技术制备的音叉振动式微机械陀螺为研究对象, 提出基于元胞自动机的结构形状自
组织优化方法, 建立自组织形状优化的局部规则和基于最终输出的性能评价方法 …

The paper presents compensation methods for a robust gyroscope sensor with an electrical
and mechanical self-test option and the ability to suppress the quadrature error. The …

为建立加工缺陷对微机械陀螺性能影响的机理性模型, 解决高精度微机械结构优化设计的计算
时间问题, 以微机械加工技术制备的音叉振动式微机械陀螺为研究对象, 利用多自由度动态有限 …

In this study, aluminum nitride (AlN) thin films reactively sputter deposited from an aluminium
target are characterized both under material related aspects as well as on device level for …

In this article we derive an analytical mathematical model for a micromachined silicon tuning-
fork gyroscope which responds to an external angular rate by a rotation about its sensitive …

In order to reduce the influence of microfabrication errors on the design performance of a
tuning fork vibratory micromachined gyroscope, and to enhance the performance robustness …

In the study of robust design of the performance of the micromachined gyroscope, in order to
solve the problems concerning to the high precision and the computing time of performance …