Accelerating interest in silicon nitride thin film material system continues in both academic
and industrial communities due to its highly desirable physical, chemical, and electrical …

We demonstrate a wide-bandgap semiconductor photonics platform based on
nanocrystalline aluminum nitride (AlN) on sapphire. This photonics platform guides light at …

Nanopore sensors provide a unique platform to detect individual nucleic acids, proteins, and
other biomolecules without the need for fluorescent labeling or chemical modifications. Solid …

After the first visible photoluminescence (PL) from porous silicon (pSi), continuous efforts are
made to fabricate Si‐based compound nanomaterials embedded in matrices such as oxide …

Silicon nitride (SiN x) serves as the charge trap layer in current 3D NAND flash memory
devices. The precise formation mechanism and electronic structure of localized defect trap …

We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich
silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the …

Monolithic integration of solid-state emitters with photonic elements of the same material is a
promising approach to overcome the constraints of fabrication complexity and coupling …

This study deals with the fabrication and characterization of silicon nanoparticles in a SiN x
dielectric matrix to have thin films of different gap energies, films essentially based on …

This work focuses on the study of the electro-optical properties of Si 3 N 4/Si multilayer (ML)
structures deposited by electron beam evaporation and thermally annealed to induce the …

Рассмотрены и обобщены результаты исследований и разработок в области
формирования контактно-барьерных структур в изделиях субмикронной электроники и …