Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook
HM Kim, DG Kim, YS Kim, M Kim… - International Journal of …, 2023 - iopscience.iop.org
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide
semiconductors has grown. They offer high mobility, low off-current, low process …
semiconductors has grown. They offer high mobility, low off-current, low process …
Vertically integrated electronics: new opportunities from emerging materials and devices
Abstract Vertical three-dimensional (3D) integration is a highly attractive strategy to integrate
a large number of transistor devices per unit area. This approach has emerged to …
a large number of transistor devices per unit area. This approach has emerged to …
First demonstration of heterogeneous IGZO/Si CFET monolithic 3-D integration with dual work function gate for ultralow-power SRAM and RF applications
SW Chang, TH Lu, CY Yang, CJ Yeh… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In this article, heterogeneous complementary field-effect-transistor (CFET) constructed by
vertically stacking amorphous indium gallium zinc oxide (a-IGZO) n-channel on poly-Si p …
vertically stacking amorphous indium gallium zinc oxide (a-IGZO) n-channel on poly-Si p …
Multi-pulse atomic layer deposition of p-type SnO thin films: growth processes and the effect on TFT performance
DE Gomersall, KM Niang, JD Parish, Z Sun… - Journal of Materials …, 2023 - pubs.rsc.org
This work demonstrates p-type SnO thin film transistors, where the SnO active layers were
deposited with atomic layer deposition (ALD) using the Sn (II) alkoxide precursor, Sn (II) bis …
deposited with atomic layer deposition (ALD) using the Sn (II) alkoxide precursor, Sn (II) bis …
Research progress of p-type oxide thin-film transistors
Z Ouyang, W Wang, M Dai, B Zhang, J Gong, M Li… - Materials, 2022 - mdpi.com
The development of transparent electronics has advanced metal–oxide–semiconductor Thin-
Film transistor (TFT) technology. In the field of flat-panel displays, as basic units, TFTs play …
Film transistor (TFT) technology. In the field of flat-panel displays, as basic units, TFTs play …
Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials
M Chen, MP Nijboer, AY Kovalgin, A Nijmeijer… - Dalton …, 2023 - pubs.rsc.org
Atomic layer deposition (ALD) is a widely recognized technique for depositing ultrathin
conformal films with excellent thickness control at Ångström or (sub) monolayer level …
conformal films with excellent thickness control at Ångström or (sub) monolayer level …
Recent progress and perspectives on atomic‐layer‐deposited semiconducting oxides for transistor applications
This paper reviews recent developments in the fabrication of high‐performance n‐channel
metal‐oxide thin‐film transistors (TFTs) through atomic‐layer deposition (ALD), which are …
metal‐oxide thin‐film transistors (TFTs) through atomic‐layer deposition (ALD), which are …
High field-effect mobility and on/off current ratio of p-type ALD SnO thin-film transistor
MG Chae, J Kim, HW Jang, BK Park… - ACS Applied …, 2023 - ACS Publications
High-performance p-type thin-film transistors (TFTs) with high field-effect mobility and high
on/off current ratios (I on/I off) were fabricated by engineering the microstructure and surface …
on/off current ratios (I on/I off) were fabricated by engineering the microstructure and surface …
Room-temperature fabrication of p-type SnO semiconductors using ion-beam-assisted deposition
Over the past decade, SnO has been considered a promising p-type oxide semiconductor.
However, achieving high mobility in the fabrication of p-type SnO films is still highly …
However, achieving high mobility in the fabrication of p-type SnO films is still highly …
The Significance of an In Situ ALD Al2O3 Stacked Structure for p‐Type SnO TFT Performance and Monolithic All‐ALD‐Channel CMOS Inverter Applications
Tin monoxide (SnO) has been studied widely over the past several decades due to its
promising theoretical p‐type performance. However, limited fabrication processes due to the …
promising theoretical p‐type performance. However, limited fabrication processes due to the …