Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook

HM Kim, DG Kim, YS Kim, M Kim… - International Journal of …, 2023 - iopscience.iop.org
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide
semiconductors has grown. They offer high mobility, low off-current, low process …

Vertically integrated electronics: new opportunities from emerging materials and devices

S Kim, J Seo, J Choi, H Yoo - Nano-Micro Letters, 2022 - Springer
Abstract Vertical three-dimensional (3D) integration is a highly attractive strategy to integrate
a large number of transistor devices per unit area. This approach has emerged to …

First demonstration of heterogeneous IGZO/Si CFET monolithic 3-D integration with dual work function gate for ultralow-power SRAM and RF applications

SW Chang, TH Lu, CY Yang, CJ Yeh… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In this article, heterogeneous complementary field-effect-transistor (CFET) constructed by
vertically stacking amorphous indium gallium zinc oxide (a-IGZO) n-channel on poly-Si p …

Multi-pulse atomic layer deposition of p-type SnO thin films: growth processes and the effect on TFT performance

DE Gomersall, KM Niang, JD Parish, Z Sun… - Journal of Materials …, 2023 - pubs.rsc.org
This work demonstrates p-type SnO thin film transistors, where the SnO active layers were
deposited with atomic layer deposition (ALD) using the Sn (II) alkoxide precursor, Sn (II) bis …

Research progress of p-type oxide thin-film transistors

Z Ouyang, W Wang, M Dai, B Zhang, J Gong, M Li… - Materials, 2022 - mdpi.com
The development of transparent electronics has advanced metal–oxide–semiconductor Thin-
Film transistor (TFT) technology. In the field of flat-panel displays, as basic units, TFTs play …

Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials

M Chen, MP Nijboer, AY Kovalgin, A Nijmeijer… - Dalton …, 2023 - pubs.rsc.org
Atomic layer deposition (ALD) is a widely recognized technique for depositing ultrathin
conformal films with excellent thickness control at Ångström or (sub) monolayer level …

Recent progress and perspectives on atomic‐layer‐deposited semiconducting oxides for transistor applications

MH Cho, CH Choi, JK Jeong - Journal of the Society for …, 2022 - Wiley Online Library
This paper reviews recent developments in the fabrication of high‐performance n‐channel
metal‐oxide thin‐film transistors (TFTs) through atomic‐layer deposition (ALD), which are …

High field-effect mobility and on/off current ratio of p-type ALD SnO thin-film transistor

MG Chae, J Kim, HW Jang, BK Park… - ACS Applied …, 2023 - ACS Publications
High-performance p-type thin-film transistors (TFTs) with high field-effect mobility and high
on/off current ratios (I on/I off) were fabricated by engineering the microstructure and surface …

Room-temperature fabrication of p-type SnO semiconductors using ion-beam-assisted deposition

M Januar, SP Prakoso, CW Zhong, HC Lin… - … Applied Materials & …, 2022 - ACS Publications
Over the past decade, SnO has been considered a promising p-type oxide semiconductor.
However, achieving high mobility in the fabrication of p-type SnO films is still highly …

The Significance of an In Situ ALD Al2O3 Stacked Structure for p‐Type SnO TFT Performance and Monolithic All‐ALD‐Channel CMOS Inverter Applications

HM Kim, SH Choi, HU Lee, SB Cho… - Advanced Electronic …, 2023 - Wiley Online Library
Tin monoxide (SnO) has been studied widely over the past several decades due to its
promising theoretical p‐type performance. However, limited fabrication processes due to the …