This paper presents design, fabrication and calibration results for a novel 2-DOF capacitive
force sensor capable of resolving forces up to 490 µN with a resolution of 0.01 µN in x, and …

Continuous growth in demand for optical network capacity and the sudden maturation of
WDM technologies have fueled the development of long-haul optical network systems that …

A silicon micromachining method has been developed to fabricate on-chip high-
performance suspended spiral inductors. The spiral structure of an inductor was formed with …

This paper reports on novel polysilicon surface-micromachined one-dimensional (1-D)
analog micromirror arrays fabricated using Sandia's ultraplanar multilevel MEMS technology …

ABSTRACT We present the Staggered Torsional Electrostatic Combdrive (STEC) fabrication
process that creates thick mirrors with hightorque actuators, thereby allowing high-speed …

Ab initio calculations within density-functional theory combined with experimental Raman
spectra on cluster-beam deposited pure-carbon films provide a consistent picture of sp …

We report on the theory and experiments of scanning micromirrors with angular vertical
comb-drive (AVC) actuators. Parametric analyses of rotational vertical comb-drive actuators …

The book gives an in-depth description of key devices of current and next generation fibre
optic communication networks. Devices treated include semiconductor lasers, optical …

Microelectromechanical systems (MEMS) gyroscopes are typically designed to measure
angular rate of rotation. A measurement of the angle itself is useful in many applications but …

In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-
D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is …