Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges

Y Zhao, Y Wang, J Shi, D Wu, C Feng… - Journal of …, 2019 - iopscience.iop.org
Terahertz time domain spectroscopy (THz-TDS) has been successfully applied in the
plasma electron density diagnosis and the validity of the measurement results has been …

[HTML][HTML] Transmission spectrum analysis of ceramic-shielded microwave cutoff probes in low-pressure plasmas

DY Hwang, HJ Yeom, G Lee, JH Kim… - Journal of Applied …, 2024 - pubs.aip.org
In this study, the influence of ceramic shield characteristics, including thickness and
geometry, on the transmission spectrum and electron density measurements of a ceramic …

Investigation of reliability of the cutoff probe by a comparison with Thomson scattering in high density processing plasmas

B Seo, DW Kim, JH Kim, S You - Physics of Plasmas, 2017 - pubs.aip.org
A “cutoff probe” uses microwaves to measure the electron density in a plasma. It is
particularly attractive because it is easy to fabricate and use, its measurement is immune to …

Analysis of uncertainty of electron density and temperature using laser Thomson scattering in helicon plasmas

BH Seo, SJ You, JH Kim - Japanese Journal of Applied Physics, 2015 - iopscience.iop.org
Although the laser Thomson scattering has been believed to be the most accurate
diagnostic method as a standard of the low temperature plasma metrology, the measurand …

Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering

BH Seo, SJ You, JH Kim, DJ Seong, YH Shin… - Thin solid films, 2013 - Elsevier
We reported the measurements of electron energy probability functions (EEPFs) in helicon
discharge using laser Thomson scattering (LTS). A problematic effect in the measurement …

Two-dimensional profile measurement of plasma parameters in radio frequency-driven argon atmospheric pressure plasma jet

BH Seo, DW Kim, JH Kim, SJ You - Physics of Plasmas, 2015 - pubs.aip.org
The two-dimensional profiles of the electron density, electron temperature, neutral
translational temperature, and molecular rotational temperature are investigated in an argon …

Normal and abnormal evolution of argon metastable density in high-density plasmas

BH Seo, JH Kim, SJ You - Physics of Plasmas, 2015 - pubs.aip.org
A controversial problem on the evolution of Ar metastable density as a function of electron
density (increasing trend versus decreasing trend) was resolved by discovering the …

On anomalous temporal evolution of gas pressure in inductively coupled plasma

BH Seo, SJ You, JH Kim, DJ Seong… - Applied Physics …, 2013 - pubs.aip.org
The temporal measurement of gas pressure in inductive coupled plasma revealed that there
is an interesting anomalous evolution of gas pressure in the early stage of plasma ignition …

[PDF][PDF] 저온플라즈마광방출진단기술

GB Chae - Information Display, 2019 - koreascience.kr
플라즈마란 이온화된 기체로 흔히 물질의 제 4 의 상태로 알려져 있다. 보통 전자와 이온 중성
기체로 이뤄져 있다. 플라즈마의 예로는 자연에 존재하는 번개나 태양에서부터 인간이 여러 …