Comparison of Terahertz time domain spectroscopy and laser Thomson scattering for electron density measurements in inductively coupled plasma discharges
Terahertz time domain spectroscopy (THz-TDS) has been successfully applied in the
plasma electron density diagnosis and the validity of the measurement results has been …
plasma electron density diagnosis and the validity of the measurement results has been …
[HTML][HTML] Transmission spectrum analysis of ceramic-shielded microwave cutoff probes in low-pressure plasmas
In this study, the influence of ceramic shield characteristics, including thickness and
geometry, on the transmission spectrum and electron density measurements of a ceramic …
geometry, on the transmission spectrum and electron density measurements of a ceramic …
Investigation of reliability of the cutoff probe by a comparison with Thomson scattering in high density processing plasmas
A “cutoff probe” uses microwaves to measure the electron density in a plasma. It is
particularly attractive because it is easy to fabricate and use, its measurement is immune to …
particularly attractive because it is easy to fabricate and use, its measurement is immune to …
Analysis of uncertainty of electron density and temperature using laser Thomson scattering in helicon plasmas
Although the laser Thomson scattering has been believed to be the most accurate
diagnostic method as a standard of the low temperature plasma metrology, the measurand …
diagnostic method as a standard of the low temperature plasma metrology, the measurand …
Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering
We reported the measurements of electron energy probability functions (EEPFs) in helicon
discharge using laser Thomson scattering (LTS). A problematic effect in the measurement …
discharge using laser Thomson scattering (LTS). A problematic effect in the measurement …
Two-dimensional profile measurement of plasma parameters in radio frequency-driven argon atmospheric pressure plasma jet
The two-dimensional profiles of the electron density, electron temperature, neutral
translational temperature, and molecular rotational temperature are investigated in an argon …
translational temperature, and molecular rotational temperature are investigated in an argon …
Normal and abnormal evolution of argon metastable density in high-density plasmas
A controversial problem on the evolution of Ar metastable density as a function of electron
density (increasing trend versus decreasing trend) was resolved by discovering the …
density (increasing trend versus decreasing trend) was resolved by discovering the …
On anomalous temporal evolution of gas pressure in inductively coupled plasma
The temporal measurement of gas pressure in inductive coupled plasma revealed that there
is an interesting anomalous evolution of gas pressure in the early stage of plasma ignition …
is an interesting anomalous evolution of gas pressure in the early stage of plasma ignition …
[PDF][PDF] 저온플라즈마광방출진단기술
GB Chae - Information Display, 2019 - koreascience.kr
플라즈마란 이온화된 기체로 흔히 물질의 제 4 의 상태로 알려져 있다. 보통 전자와 이온 중성
기체로 이뤄져 있다. 플라즈마의 예로는 자연에 존재하는 번개나 태양에서부터 인간이 여러 …
기체로 이뤄져 있다. 플라즈마의 예로는 자연에 존재하는 번개나 태양에서부터 인간이 여러 …