A recent, important development in low‐pressure and low‐temperature plasma processing
is the microwave electron cyclotron resonance (ECR) discharge. Its lack of electrodes and its …

Microwave discharges (MD) are widely used as a source of non-equilibrium low pressure
plasma for different applications. This paper reviews the methods of microwave plasma …

A new HF device is described. It allows the production, without the use of a magnetic field, of
long plasma columns from a small HF coupling structure situated at one end of the column …

A review is presented on the historical, fundamental, and practical aspects of microwave-
induced plasmas (MIP) and their application to spectrochemical analysis. In particular, the …

The design and performance of an improved microwave plasma assisted chemical vapor
deposition (MPACVD) reactor is described. This reactor operates with high power densities …

This paper presents a theoretical analysis of high-frequency, diffusion-controlled discharges
in which the ionization is provided by direct electron impact with gas atoms within the …

Small cylindrical tubes made from alumina and alumina doped with magnesia were sintered
in a microwave induced oxygen plasma, initiated and sustained inside a tunable single …

US4507588A - Ion generating apparatus and method for the use thereof - Google Patents
US4507588A - Ion generating apparatus and method for the use thereof - Google Patents Ion …

The fundamental operational behavior of a microwave cavity plasma reactor was studied for
pressures between 120 and 400 Torr, ie the plasma dimensions, the absorbed power …

A method (1) for determining and controlling patterns of change of heating as a function of
time for controlled heating of similar materials B, Ba or Bb or (2) for deter mining changing …