Metallic Zn is an appealing anode for aqueous Zn-ion batteries, but it suffers from corrosion
and Zn dendrites. In this work, we develop a nonstoichiometric silicon nitride (SiN x) film with …

利用微波ECR 磁控反应溅射法在室温下制备无氢SiNx 薄膜. 通过傅里叶红外光谱, X
射线电子谱, 膜厚仪, 纳米硬度仪, 原子力显微镜等分析手段, 分析了N2 流量, Si …

PECVD deposited SiNx has been used in PV industry especially for PERC solar cell as anti-
reflection coating (ARC) and passivating layer [1]. However, its limited optical and electrical …

This study investigates the effect of silicon nitride (Si single bond N)-coated carbon fibers on
the thermal conductivity of carbon-fiber-reinforced epoxy composite. The surface properties …

The properties of plasma in Ar/N 2 microwave electron cyclotron resonance discharge with a
percentage of N 2 flow rate ranging from 5% to 50% have been studied in order to …

SiN and SiCN film production using plasma-enhanced atomic layer deposition (PE-ALD) is
investigated in this study. A developed high-power and high-density multiple inductively …

利用自主研发的线性微波化学气相沉积系统在不同微波功率, 微波占空比, 基片温度,
特气比例条件下制备了SiNx 薄膜. 通过扫描电子显微镜, 椭圆偏振仪等表征测量技术 …

This paper reports that amorphous silicon nitride (a-SiN x) overcoats were deposited at room
temperature by microwave ECR plasma enhanced unbalanced magnetron sputtering. The 2 …

Hydrogen-free amorphous silicon nitride (SiNx) films were deposited at room temperature by
microwave electron cyclotron resonance plasma-enhanced unbalance magnetron …

As a deposition layer, silicon nitride (SiN) films are widely used in manufacturing silicon
solar cells. To develop a cost-effective manufacturing process, deposition processes at …