Entering the era of the Internet of Things (IoT) and fifth-generation (5G) mobile networks, the
demand for compact, cost-effective, and high-performance sensors and actuators is …

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended
silicon nitride waveguides enables the precise alignment of these waveguides to other …

In this paper, a piezoelectric micro energy harvester (PMEH) fabricated on stainless-steel
substrates is presented. Through the design and fabrication of the PMEH, a high-quality lead …

Resonant rotational scanning micromirrors with electrostatic comb-drive actuators are widely
used in generating structured lights for 3D sensing, but their resonant scanning stability is …

This paper presents the design, fabrication, and characterization of a novel CMOS-
compatible 2-D MEMS scanning mirror based on hybrid actuation mechanisms. Both …

We present design, fabrication, and characteristics of two-dimensional micro-machined
comb-drive scanner to operate in vacuum. The scanner can be actuated in two orthogonal …

The maximum scan angle amplitude of resonating micro-mirrors, intended for micro-
projection display applications is limited by air damping. Three-dimensional transient Navier …

We herein present the design, fabrication, and wafer-level packaging of an electromagnetic
biaxial scanning micromirror. The vacuum packaging of the micromirror was implemented by …

A novel damping model to accurately analyze the scanning angle of electrostatic
microelectromechanical system (MEMS) mirrors is proposed in this article. The …

This paper presents the design, fabrication, and characterization of a MEMS actuator with
large static deflection as a waveguide-mounted variable millimeter-wave phase shifter. The …