[HTML][HTML] Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
Aluminum nitride (AlN) is a technologically relevant material that can be deposited at low
temperatures in the form of thin-films while preserving most of its physical properties …
temperatures in the form of thin-films while preserving most of its physical properties …
A review of the recent applications of aluminum nitride-based piezoelectric devices
Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …
because many technologies utilize their core properties of piezoelectric materials. Previous …
The recent progress of MEMS/NEMS resonators
L Wei, X Kuai, Y Bao, J Wei, L Yang, P Song, M Zhang… - Micromachines, 2021 - mdpi.com
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and
quantum coupling. This paper reviews the latest research progress of MEMS/NEMS …
quantum coupling. This paper reviews the latest research progress of MEMS/NEMS …
Exploring low-loss surface acoustic wave devices on heterogeneous substrates
This article presents shear horizontal surface acoustic wave (SH-SAW) devices with
excellent temperature stability and low loss on ultrathin Y42-cut lithium tantalate film on …
excellent temperature stability and low loss on ultrathin Y42-cut lithium tantalate film on …
A ferroelectric-gate fin microwave acoustic spectral processor
Wireless communication through dynamic spectrum allocation is essential to accommodate
increasing data traffic. This requires massive arrays of radiofrequency filters for adaptive …
increasing data traffic. This requires massive arrays of radiofrequency filters for adaptive …
Aerosol jet printing of piezoelectric surface acoustic wave thermometer
Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems
(MEMS) that generate an acoustic emission when electrically stimulated. These transducers …
(MEMS) that generate an acoustic emission when electrically stimulated. These transducers …
Two-dimensional AlN/g-CNs van der Waals type-II heterojunction for water splitting
A type-II van der Waals heterojunction photocatalyst is not only an ideal material for
hydrogen production by water splitting, but also an important way to improve efficiency and …
hydrogen production by water splitting, but also an important way to improve efficiency and …
Synthesis and Characteristics of Transferrable Single‐Crystalline AlN Nanomembranes
Single‐crystalline inorganic semiconductor nanomembranes (NMs) have attracted great
attention over the last decade, which poses great advantages to complex device integration …
attention over the last decade, which poses great advantages to complex device integration …
Characterization of AlN and AlScN film ICP etching for micro/nano fabrication
We investigate the inductively coupled plasma (ICP) etching characteristics of (0002)
Aluminum Nitride (AlN) and Aluminum Scandium Nitride (Al 0.94 Sc 0.06 N) piezoelectric …
Aluminum Nitride (AlN) and Aluminum Scandium Nitride (Al 0.94 Sc 0.06 N) piezoelectric …
Aluminum nitride thin film based reconfigurable integrated photonic devices
In the past few decades, silicon photonics with complementary metal-oxide-semiconductor
(CMOS) process compatibility has been well developed and successfully applied to …
(CMOS) process compatibility has been well developed and successfully applied to …