This paper presents a fast design strategy for MEMS capacitive pressure sensors with
sealed cavities. Based on circular Kirchhoff-Love plate theory and the perfect gas law, the …

This paper presents the capacitive differential pressure sensor (CDPS) structure modeling,
diaphragm material selection for CDPS and the analysis on deflection and capacitive …

Capacitive pressure sensors are making themselves the leader among its market
competitors since they consume less power with less temperature sensitivity. This paper …

This paper presents a ring oscillator based readout circuit for differential capacitive MEMS.
Flicker noise is reduced by modulating it to frequencies above the bandwidth of interest and …

There are applications that need pressure sensors which produce easily transmittable digital
output and are free from inherent disadvantage of conventional piezoresistive and …

基于MEMS 工艺, 提出了一种球冠形底部固定极板与复合膜可动上极板结合的电容式微机械
压力传感器. 改变了经典的上下电极接触过程, 并增加了深刻蚀工艺附加深孔结构 …

For the purpose of the identification and quantification of the plasma effect on gas flow rate
in atmospheric pressure discharges there was a strong need for differential manometer for …

In recent years, the use of voice communication and speech recognition applications has
increased. This has resulted in an evolution of the voice processing algorithms and a …

وقد وجدنا أن خطية وحساسية الحساس تتعلق بالمجال الديناميكي. وديناميكية الحساس تتعلق
بمساحة الصفيحة القابلة للحركة وسماكتها وثابت صلابتها أو مرونتها. وأن عمل ثقب في الصفيحة …‎