Investigation on HfO2 properties grown by ALD using TDMAH as precursor
Y Li, S Deng, J Li, G Li, S Zhang, Y Jin - Vacuum, 2022 - Elsevier
HfO 2 films have increasingly extensive applications in optical and electronic industry. In
order to obtain controllable properties of HfO 2 film, its growth behavior needs to be studied …
order to obtain controllable properties of HfO 2 film, its growth behavior needs to be studied …
Grain fragmentation and phase transformations in hafnium oxide induced by swift heavy ion irradiation
We report on the 100 MeV Ag ion irradiation-induced modifications in hafnium oxide films
deposited by radio frequency (RF) magnetron sputtering method. The phase transformations …
deposited by radio frequency (RF) magnetron sputtering method. The phase transformations …
Ion induced crystallization and grain growth of hafnium oxide nano-particles in thin-films deposited by radio frequency magnetron sputtering
We report on the swift heavy ion (SHI) irradiation induced crystallization and grain growth of
HfO 2 nanoparticles (NPs) within the HfO 2 thin-films deposited by radio frequency (RF) …
HfO 2 nanoparticles (NPs) within the HfO 2 thin-films deposited by radio frequency (RF) …
Fabrication Strategies of Metal–Ferroelectric–Insulator–Silicon Gate Stacks Using Ferroelectric Hf–Zr–O and High-k HfO2 Insulator Layers for Securing Robust …
JJ Kim, SE Moon, SM Yoon - ACS Applied Electronic Materials, 2022 - ACS Publications
Metal–ferroelectric–insulator–Si (MFIS) gate stack structures were fabricated and
characterized to investigate the optimum process indicators when HfO2-based thin films …
characterized to investigate the optimum process indicators when HfO2-based thin films …
Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance
A novel BEOL compatible three-layered structure based on ferroelectric (FE) HfO 2 device is
proposed for endurance improvement. This structure consists of an ultrathin Y 2 O 3 …
proposed for endurance improvement. This structure consists of an ultrathin Y 2 O 3 …
Protective Coatings of W–Re Thermocouples for Use in Aggressive Environments
GV Kirichuk, AA Kozlov, PA Prokopovich… - Journal of Surface …, 2023 - Springer
A method for growing a hafnium oxide (HfO2) protective coating on the surface of a tungsten-
rhenium (W–Re) thermocouple is described, the structural and morphological properties and …
rhenium (W–Re) thermocouple is described, the structural and morphological properties and …
Investigation of the effect of N2 gas flow rate on the optical, structural and morphological properties of indium-gallium-nitride triple thin films obtained by sputter …
E Erdoğan, M Kundakçı - Niğde Ömer Halisdemir Üniversitesi …, 2018 - dergipark.org.tr
In this research work, InGaN (Indium Gallium Nitride) triple compound was grown under
different N2 gas flow rates by using sputtering technique. The structural, optical and …
different N2 gas flow rates by using sputtering technique. The structural, optical and …
[引用][C] N2 GAZ AKIŞ HIZININ, SPUTTER TEKNİĞİNDEN ELDE EDİLEN İNDİYUM-GALYUM-NİTRÜR ÜÇLÜ İNCE FİLMİNİN OPTİK, YAPISAL VE MORFOLOJİK …
E ERDOĞAN, M KUNDAKÇI - Ömer Halisdemir Üniversitesi Mühendislik Bilimleri …