The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Chemical and physical processes driven by multiphoton absorption make possible the
fabrication of complex, 3D structures with feature sizes as small as 100 nm. Since its …

The use of swarms of nanobots to perform seemingly miraculous tasks is a common trope in
the annals of science fiction. 1 Although several of these remarkable feats are still very much …

Without plasma processing techniques, recent advances in microelectronics fabrication
would not have been possible. But beyond simply enabling new capabilities, plasma-based …

With the increasing requirements for microelectromechanical systems (MEMS) regarding
stability, miniaturization and integration, novel materials such as wide band gap …

A laser direct-writing technique employing multiphoton absorption processes has become a
powerful and widely used tool in the fabrication of micro-/nanometer-scale structures in the …

Semiconductor nanowires are widely considered as the building blocks that revolutionized
many areas of nanosciences and nanotechnologies. The unique features in nanowires …

This study reports an approach, laser-induced plasma-assisted penetration (LIPAP), to
facilitate copper diffusion to the glass interior using a femtosecond laser. TEM images and …

Chemical vapor deposition (CVD) is an established process for the production of thin solid
films for industrial and scientific applications for more than 30 years. CVD is a multiscale …

This review concentrates on the applications of nanoimprint lithography (NIL) and hot
embossing for the fabrications of nanolectronic devices, nanophotonic metamaterials and …