Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)
A Anders - Journal of Applied Physics, 2017 - pubs.aip.org
High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines
magnetron sputtering with pulsed power concepts. By applying power in pulses of high …
magnetron sputtering with pulsed power concepts. By applying power in pulses of high …
Towards smart electrolytic plasma technologies: An overview of methodological approaches to process modelling
EV Parfenov, A Yerokhin, RR Nevyantseva… - Surface and Coatings …, 2015 - Elsevier
This paper reviews the present understanding of electrolytic plasma processes (EPPs) and
approaches to their modelling. Based on the EPP type, characteristics and classification, it …
approaches to their modelling. Based on the EPP type, characteristics and classification, it …
[HTML][HTML] Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film
Ion irradiation is a key tool for controlling the nanostructure, phase content, and physical
properties of refractory ceramic thin films grown at low temperatures by magnetron …
properties of refractory ceramic thin films grown at low temperatures by magnetron …
Foundations of low-temperature plasma enhanced materials synthesis and etching
GS Oehrlein, S Hamaguchi - Plasma Sources Science and …, 2018 - iopscience.iop.org
Low temperature plasma (LTP)-based synthesis of advanced materials has played a
transformational role in multiple industries, including the semiconductor industry, liquid …
transformational role in multiple industries, including the semiconductor industry, liquid …
Photocatalytic indoor/outdoor air treatment and bacterial inactivation on CuxO/TiO2 prepared by HiPIMS on polyester cloth under low intensity visible light
In this study, photoactive Cu x O/TiO 2 coatings were prepared using magnetron sputtering
operated at different powers and modes (Direct-current magnetron sputtering and High …
operated at different powers and modes (Direct-current magnetron sputtering and High …
Sputtering onto liquids: a critical review
A Sergievskaya, A Chauvin… - Beilstein Journal of …, 2022 - beilstein-journals.org
Sputter deposition of atoms onto liquid substrates aims at producing colloidal dispersions of
small monodisperse ultrapure nanoparticles (NPs). Since sputtering onto liquids combines …
small monodisperse ultrapure nanoparticles (NPs). Since sputtering onto liquids combines …
Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
G Greczynski, S Mráz, JM Schneider… - Journal of Applied …, 2020 - pubs.aip.org
Up until recently, thin film growth by magnetron sputtering relied on enhancing adatom
mobility in the surface region by gas-ion irradiation to obtain dense layers at low deposition …
mobility in the surface region by gas-ion irradiation to obtain dense layers at low deposition …
Energy flux measurements during magnetron sputter deposition processes
AL Thomann, A Caillard, M Raza, M El Mokh… - Surface and Coatings …, 2019 - Elsevier
The influence of energetic species on thin film growth mechanism is a long-term issue in the
field of low-pressure plasma-based magnetron sputtering technology. Several species may …
field of low-pressure plasma-based magnetron sputtering technology. Several species may …
[HTML][HTML] Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems
This work is devoted to the identification properties of indium tin oxide (ITO) thin films
responsible for their possible application in combined optical and electrochemical label-free …
responsible for their possible application in combined optical and electrochemical label-free …
Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping
N Britun, M Palmucci, S Konstantinidis… - Journal of Applied …, 2015 - pubs.aip.org
Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering
discharge has been performed. This paper deals with two-dimensional density mapping in …
discharge has been performed. This paper deals with two-dimensional density mapping in …