4. 5 23s46 A 6/1985 Breckinridge et al. test Surface in a second mode of operation that
interferometri 4.576. 479 A 3, 1986 Downs cally profiles a topography of the test Surface …

(51) Int. Cl. G0IB II/02(2006.01) A method including comparing information derivable from
(52) US Cl 356/5.11: 356/497 a scanning interferometry signal for a first Surface location irr …

Disclosed is an interferometry analysis method that includes comparing information
derivable from multiple interferometry signals corresponding to different surface locations of …

Disclosed is a system including:(i) an interferometer config ured to direct test
electromagnetic radiation to a test surface and reference electromagnetic radiation to a …

Int. Cl. GIB II/02(2006.01) A method including: providing a low coherence scanning (52) US
Cl........................ 356/497; 356/511; 356/504 interferometry data for at least one spatial …

(57) ABSTRACT A method including: imaging test light emerging from a test object over a
range of angles to interfere with reference light on a detector, wherein the test and reference …

A method including comparing information derivable from a scanning interferometry signal
for a first surface location of a test object to information corresponding to multiple models of …

the invention relates to surface topography measurements of objects having thin films or
discrete structures of dissimilar materials. Such measurements are relevant to the …

4,576.479 A 3/1986 Downs 6.545, 761 B1 4/2003 Aziz et al. 4,583,858. A 4/1986 Lebling et
al. 6,545,763 B1 4/2003 Kimetal. 4,618,262 A 10/1986 Maydan et al. 6,590,656 B2 7/2003 …

Disclosed is a system including:(i) an interferometer configured to direct test electromagnetic
radiation to a test surface and reference electromagnetic radiation to a reference surface …